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Flood gun

A flood gun is an electromechanical device that provides a steady flow of low-energy electrons to a desired target or "flood area." Typically, the… 
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Related topics

2 relations
Ion implantationSemiconductor

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Review
2017
Review
2017
condition results from a deficiency in steroid sulfatase and causes extreme scaling of the skin and both
This work demonstrates the ability to detect changes in both quantity and spatial distribution of human stratum corneum (SC… 
2014
2014
Pinch plasma bridge flood gun for substrate charge neutralization
Plasma flood gun for ion implantation system comprises an insulating block portion, and the first and second conductive block… 
2014
2014
Pinched plasma bridge flood gun for substrate charge neutralization
이온 주입 시스템에 대한 플라즈마 루프 어셈블리는, 절연 블록 부분 및 절연 블록 부분의 대향하는 면들 상에 배치된 제 1 및 제 2 전도성 블록 부분들을 포함한다. 전도성 스트랩들은 제 1 및 제 2… 
2009
2009
Charging control on high energy implanters: A process requirement demonstrated by plasma damage monitoring
2009
2009
Verification and reduction of surface charging during high/medium current implantations by implementing plasma damage monitoring
2006
2006
Technique for providing an inductively coupled radio frequency plasma flood gun
A technique for providing an inductively coupled radio frequency plasma flood gun is disclosed. In one particular exemplary… 
1997
1997
Direct simulation Monte Carlo of inductively coupled plasma and comparison with experiments
ABSTRACT Direct simulation Monte Carlo was used to study ion and neutral transport and reaction in a low-gas-pressure highplasma… 
1996
1996
Investigation of negative charging with plasma flood gun (PFG) during high current implantation
Implantation of semiconductor devices at very high beam currents can often lead to device damage due to charging. Depending upon… 
1985
1985
Quantitative determination of boron and phosphorus in borophosphosilicate glass by secondary ion mass spectrometry
Profils de concentration de films de borophosphosilicate. La distribution de P et B est obtenue avec une precision de ±15% 
1962
1962
Image Storage Techniques Applied to Diagnostic Radiology
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