Elliptical and stepper machines
National Institutes of Health
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The current trend in the development of electric drive systems is the replacement of mechanical transmissions and kinematic…
This article discusses about the application of stepper motors in CNC device. Correct understanding of principles of stepper…
Hybrid stepper motors combine the features of permanent magnet and variable reluctance motors, which makes them an attractive…
Evaluation of lithography process or stepper involves very large quantity of CD measurements and measurement time. In this paper…
E-learning has introduced new opportunities in teaching and learning electrical engineering subjects. This paper presents the…
Conventional lithography techniques have been losing their ability to easily support continuous shrinking of feature sizes…
ASML-Special Applications has shown its ability to align and quantify overlay in thick films to address alignment and metrology…
Gary E. Flores is a senior applications engineer at Ultratech Stepper, where he is responsible for application support and…
By optimization of SUCCESS ST2 an environmentally stable and robust deep UV positive resist has been derived where the generally…
The need for photolithographic equipment to automatically align with improved accuracy is imperative, particularly considering…