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AsmL
Known as:
ASML programming language
Abstract State Machine Language (AsmL) is a programming language based on the Abstract State Machines formal method and developed by Microsoft. AsmL…
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Related topics
Related topics
3 relations
Finite-state machine
Functional programming
Programming language
Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
Review
2015
Review
2015
Monitoring process-induced focus errors using high-resolution flatness metrology
B. Morgenfeld
,
T. Brunner
,
+7 authors
J. Sinha
Advanced Semiconductor Manufacturing Conference
2015
Corpus ID: 38434764
Reducing focus errors during optical lithography patterning is crucial for minimizing defects and for achieving the desired…
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2012
2012
From performance validation to volume introduction of ASML's NXE platform
H. Meiling
,
W. D. de Boeij
,
+12 authors
R. Kool
Advanced Lithography
2012
Corpus ID: 120803616
ASML's NXE platform is a multi-generation TWINSCAN™ platform using an exposure wavelength of 13.5nm, featuring a plasma source…
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2009
2009
Conformance analysis of ASML's test process
A. Rozinat
,
de Ism Ivo Jong
,
Cw Christian Günther
,
Wil M.P. van der Aalst
2009
Corpus ID: 13302144
Process mining allows for the automated discovery of process models from event logs. These models provide insights and enable…
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2009
2009
Process transfer strategies between ASML immersion scanners
Yuan He
,
Peter D. Engblom
,
+7 authors
M. Dusa
Advanced Lithography
2009
Corpus ID: 123171836
A top challenge for Photolithographers during a process transfer involving multiple-generation scanners is tool matching. In a…
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2009
2009
Flare evaluation of ASML alpha demo tool
H. Mizuno
,
G. McIntyre
,
C. Koay
,
M. Burkhardt
,
B. L. La Fontaine
,
O. Wood
Advanced Lithography
2009
Corpus ID: 119538695
EUV lithography is one of the most promising methods for next-generation lithography below 22 nm half pitch. However, critical…
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Review
2008
Review
2008
Automated Fault Diagnosis in Embedded Systems
P. Zoeteweij
,
J. Pietersma
,
Rui Abreu
,
A. Feldman
,
A. V. Gemund
Second International Conference on Secure System…
2008
Corpus ID: 1890016
Automated fault diagnosis is emerging as an important factor in achieving an acceptable and competitive cost/dependability ratio…
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2007
2007
A Semantic Anchoring Infrastructure for the Design of Embedded Systems
G. Hemingway
,
Hang Su
,
Kai Chen
,
T. Koo
Annual International Computer Software and…
2007
Corpus ID: 14854263
Embedded systems are a key enabling technology for the recent vast increase in functionality of a huge list of critical…
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2006
2006
A semantic anchoring infrastructure for model-integrated computing
J. Sztipanovits
,
Kai Chen
2006
Corpus ID: 64160372
Model-Integrated Computing (MIC) is an approach for model-based design of embedded software and systems. MIC places strong…
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2004
2004
Formal Specification of a Web Services Protocol
James E. Johnson
,
D. Langworthy
,
Leslie Lamport
,
F. Vogt
WSFM
2004
Corpus ID: 267812628
1998
1998
Electronic multimedia publishing : enabling technologies and authoring issues
F. Makedon
,
Samuel A. Rebelsky
1998
Corpus ID: 60178144
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