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AsmL

Known as: ASML programming language 
Abstract State Machine Language (AsmL) is a programming language based on the Abstract State Machines formal method and developed by Microsoft. AsmL… 
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Finite-state machineFunctional programmingProgramming language

Papers overview

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2017
2017
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections
With shrinking design rules, the overall patterning requirements are getting aggressively tighter and tighter. For the 5-nm node… 
2015
2015
Axisymmetric multiphase lattice Boltzmann method for generic equations of state
2013
2013
Applying Model Transformation and Event-B for Specifying an Industrial DSL
In this paper we describe our experience in applying the Event-B formalism for specifying the dynamic semantics of a real-life in… 
2012
2012
From performance validation to volume introduction of ASML's NXE platform
ASML's NXE platform is a multi-generation TWINSCAN™ platform using an exposure wavelength of 13.5nm, featuring a plasma source… 
2009
2009
Conformance analysis of ASML's test process
Process mining allows for the automated discovery of process models from event logs. These models provide insights and enable… 
2006
2006
Optical Network Components Based on Microring Resonators
In the last years much effort has been made to arrive at optical integrated circuits with high complexity and advanced… 
2006
2006
Interferometric measurement of workpiece flatness in ultra‐precision flycutting
Purpose – The purpose of this paper is to show how an ultra‐precision manufacturing process (flycutting) can be improved through… 
2005
2005
Modeling Urban Crime Patterns: Viewing Multi-Agent Systems as Abstract State Machines
By combining the abstract state machine (ASM) formalism with the multi-agent modeling paradigm, we obtain a formal framework for… 
2004
2004
Formal Specification of a Web Services Protocol
2002
2002
EXTATIC: ASML's α-tool development for EUVL
Within the recently initiated EXTATIC project a complete full-field lithography exposure tool for he 50-nm technology node is… 
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