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AsmL

Known as: ASML programming language 
Abstract State Machine Language (AsmL) is a programming language based on the Abstract State Machines formal method and developed by Microsoft. AsmL… 
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3 relations
Finite-state machineFunctional programmingProgramming language

Papers overview

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Review
2015
Review
2015
Monitoring process-induced focus errors using high-resolution flatness metrology
Reducing focus errors during optical lithography patterning is crucial for minimizing defects and for achieving the desired… 
2012
2012
From performance validation to volume introduction of ASML's NXE platform
ASML's NXE platform is a multi-generation TWINSCAN™ platform using an exposure wavelength of 13.5nm, featuring a plasma source… 
2009
2009
Conformance analysis of ASML's test process
Process mining allows for the automated discovery of process models from event logs. These models provide insights and enable… 
2009
2009
Process transfer strategies between ASML immersion scanners
A top challenge for Photolithographers during a process transfer involving multiple-generation scanners is tool matching. In a… 
2009
2009
Flare evaluation of ASML alpha demo tool
EUV lithography is one of the most promising methods for next-generation lithography below 22 nm half pitch. However, critical… 
Review
2008
Review
2008
Automated Fault Diagnosis in Embedded Systems
Automated fault diagnosis is emerging as an important factor in achieving an acceptable and competitive cost/dependability ratio… 
2007
2007
A Semantic Anchoring Infrastructure for the Design of Embedded Systems
Embedded systems are a key enabling technology for the recent vast increase in functionality of a huge list of critical… 
2006
2006
A semantic anchoring infrastructure for model-integrated computing
Model-Integrated Computing (MIC) is an approach for model-based design of embedded software and systems. MIC places strong… 
2004
2004
Formal Specification of a Web Services Protocol
1998
1998
Electronic multimedia publishing : enabling technologies and authoring issues
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