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Submillimeter-Wavelength Plasma Diagnostics For Semiconductor Manufacturing, ed. by D.G. Seiler, A.C. Diebold, T.J. Schaffner, R. McDonald, S. Zollner, R.P. Khosla, and E.M. Secula

Submillimeter‐Wavelength Plasma Diagnostics For Semiconductor Manufacturing

Submillimeter‐wavelength, linear‐absorption spectroscopy has been applied as a chemical diagnostic of a reactive‐ion etching plasma in a modified capacitively coupled Gaseous Electronics Conference…
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