trisilylamine
National Institutes of Health
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The present invention relates to a process for producing ammonia and monochlorosilane and trisilylamine in the gas phase…
The present invention is a special process for preparing trisilylamine from mono Bruno chlorosilane with ammonia in the liquid…
The present invention relates to a special process for preparing trisilylamine from monochlorosilane and ammonia in the liquid…
The present invention relates to a special process for preparing monochlorosilane of trisilylamine and ammonia in the liquid…
FIELD: process engineering. SUBSTANCE: invention discloses the tubular flow reactor of ideal displacement with laminar flow for…
Silicon nitride films are used as oxidation barriers, mobile ion barriers, hard masks and capacitor dielectrics in integrated…
Silane gas has been used for three decades as a precursor for plasma enhanced chemical vapour deposition processes but is…