trisilylamine

 
National Institutes of Health

Topic mentions per year

Topic mentions per year

2001-2016
0120012016

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2016
2016
We report the plasma-enhanced atomic layer deposition (PEALD) of silicon nitride thin film using a silylamine compound as the… (More)
  • figure 1
  • figure 5
  • figure 3
  • figure 4
  • figure 6
Is this relevant?
2008
2008
Film properties of TaN-based metal (TaCN and TaSi N) have been precisely controlled for plasma enhanced ALD (PEALD) and thermal… (More)
  • figure 2
  • table 1
  • figure 1
Is this relevant?
2006
2006
Silicon nitride films are used as oxidation barriers, mobile ion barriers, hard masks and capacitor dielectrics in integrated… (More)
  • figure 1
  • figure 2
  • figure 3
  • figure 5
  • figure 6
Is this relevant?
2001
2001
New infrared spectra are reported for variously labelled trisilylamines. Quantum-chemical (QC) calculations of structure and… (More)
Is this relevant?