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trisilylamine

National Institutes of Health

Papers overview

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2012
2012
The present invention relates to a process for producing ammonia and monochlorosilane and trisilylamine in the gas phase… 
2012
2012
The present invention is a special process for preparing trisilylamine from mono Bruno chlorosilane with ammonia in the liquid… 
2012
2012
The present invention relates to a special process for preparing trisilylamine from monochlorosilane and ammonia in the liquid… 
2011
2011
The present invention relates to a special process for preparing monochlorosilane of trisilylamine and ammonia in the liquid… 
2010
2010
FIELD: process engineering. SUBSTANCE: invention discloses the tubular flow reactor of ideal displacement with laminar flow for… 
2006
2006
Silicon nitride films are used as oxidation barriers, mobile ion barriers, hard masks and capacitor dielectrics in integrated… 
1999
1999
Silane gas has been used for three decades as a precursor for plasma enhanced chemical vapour deposition processes but is… 
1972
1972