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trisilylamine

 
National Institutes of Health

Papers overview

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2012
2012
The present invention is a special process for preparing trisilylamine from mono Bruno chlorosilane with ammonia in the liquid… Expand
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2012
2012
The present invention relates to a process for producing ammonia and monochlorosilane and trisilylamine in the gas phase… Expand
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2012
2012
The present invention relates to a special process for preparing trisilylamine from monochlorosilane and ammonia in the liquid… Expand
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2011
2011
The present invention relates to a special process for preparing monochlorosilane of trisilylamine and ammonia in the liquid… Expand
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2010
2010
FIELD: process engineering. SUBSTANCE: invention discloses the tubular flow reactor of ideal displacement with laminar flow for… Expand
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2006
2006
Silicon nitride films are used as oxidation barriers, mobile ion barriers, hard masks and capacitor dielectrics in integrated… Expand
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2001
2001
New infrared spectra are reported for variously labelled trisilylamines. Quantum-chemical (QC) calculations of structure and… Expand
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1999
1999
Silane gas has been used for three decades as a precursor for plasma enhanced chemical vapour deposition processes but is… Expand
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1972
1972
 
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