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poly(o-phenylenediamine)
Known as:
poly-o-phenylenediamine
National Institutes of Health
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Phenylenediamines
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2002
2002
Material Properties and Process Compatibility of Spin-on Nano-foamed Polybenzoxazole for Copper Damascene Process
T. Enoki
,
Kenzo Maejima
,
H. Saito
,
A. Katsumura
2002
Corpus ID: 12757070
Abstract : We have developed nano-foamed OxD which has good properties such as dielectric constant=2.2, homogeneous distributed…
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