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archaeon OC6
National Institutes of Health
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1995
1995
OC6 ナノメータ微細加工技術を用いた陽極酸化微小ギャップ構造10GHz帯弾性表面波変換器及び一方向性フィルタ(超音波デバイス)
和彦 山之内
,
青木 和夫
,
辻 大俊
,
我妻 康夫
1995
Corpus ID: 181891370