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Specimen Source Codes - Plasma

Known as: Plasma 
National Institutes of Health

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Plasma

Papers overview

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2016
2016
Low-Leakage Tetragonal ZrO2 (EOT < 1 nm) With In Situ Plasma Interfacial Passivation on Germanium
We successfully fabricated gate stacks (ZrO2/GeOx/Ge) with a subnanometer equivalent oxide thickness (EOT) and low-leakage… 
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