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RNU6-1040P gene
Known as:
RNA, U6 small nuclear 1040, pseudogene
, RNU6-1040P
National Institutes of Health
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2001
2001
Materials and Resists for 193 and 157nm Applications
M. Padmanaban
,
Eric L. Alemy
,
+9 authors
Ki-Soo Shin
2001
Corpus ID: 64311201
Polymeric materials and resists for 193 and 157nm applications have shown good progress. Improvements and status in the area of…
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