Polystrata

National Institutes of Health

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2007

2007

NOMENCLATURE Parameter Description Value Units Free Space Permittivity Young ’ s Modulus Shear Modulus Poisson ’ s Ratio-Yield Stress Acceleration

C. McCoyYa-Mei ChenD. WaltherA. Pisano
2007
Corpus ID: 147702000

The research presents a novel, parametrically optimized, two degree of freedom (DOF), staggered vertical comb drive actuated…