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Petrotoga sp. AR80
National Institutes of Health
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Printing of structures less than 0,3 &mgr;m by i-line exposure using resists TDMR-AR80 and TDMR-AR95
SPIE Advanced Lithography
Corpus ID: 121335973
There is increasing interest in high resolution i-line resists which allow the printing of structures smaller than 0.3&mgr;m. We…
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