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Microtechnology

Known as: Micromanufacturings, Microfabrications, Microtechnologies 
Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS… 
National Institutes of Health

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Papers overview

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Review
2010
Review
2010
CRITICAL REVIEW www.rsc.org/loc | Lab on a Chip Chitosan: an integrative biomaterial for lab-on-a-chip devices
  • 2010
  • Corpus ID: 18836834
Review
2007
Review
2007
A decade of microfluidic analysis coupled with electrospray mass spectrometry: an overview.
This review presents a thorough overview covering the period 1997-2006 of microfluidic chips coupled to mass spectrometry through… 
Highly Cited
2004
Highly Cited
2004
A 5-V operated MEMS variable optical attenuator by SOI bulk micromachining
We report the design, fabrication, and successful demonstration of microelectromechanical variable optical attenuator (VOA) using… 
Highly Cited
2001
Highly Cited
2001
High‐speed separation system of randomly suspended single living cells by laser trap and dielectrophoresis
We developed a new system for random separation of a single microorganism, such as a living cell and a microbe, in the… 
Highly Cited
2000
Highly Cited
2000
Microfabricated isoelectric focusing device for direct electrospray ionization‐mass spectrometry
A novel microfabricated device for isoelectric focusing (IEF) incorporating an optimized electrospray ionization (ESI) tip was… 
Review
2000
Review
2000
Fabrication inside microchannels using fluid flow.
This Account summarizes techniques for carrying out microfabrication of structures with dimensions down to 10 microm in… 
Highly Cited
1997
Highly Cited
1997
A microfabricated device for rapid protein identification by microelectrospray ion trap mass spectrometry.
Nanoelectrospray mass spectrometry, the infusion at low flow rates of unseparated peptide mixtures representing protein… 
Highly Cited
1996
Highly Cited
1996
Screen-printable sol-gel enzyme-containing carbon inks.
Enzymes usually cannot withstand the high-temperature curing associated with the thick-film fabrication process and require a… 
Highly Cited
1994
Highly Cited
1994
Viscous air damping in laterally driven microresonators
  • Xia ZhangW. Tang
  • Proceedings IEEE Micro Electro Mechanical Systems…
  • 1994
  • Corpus ID: 55404440
A systematic experimental study of viscous air damping in laterally moving planar microstructures is reported. Previous studies… 
Highly Cited
1993
Highly Cited
1993
TMAH/IPA anisotropic etching characteristics
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