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Microtechnology

Known as: Micromanufacturings, Microfabrications, Microtechnologies 
Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS… 
National Institutes of Health

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Papers overview

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2012
2012
Facile fabrication of true three-dimensional microcoils inside fused silica by a femtosecond laser
This paper presents a facile method for the fabrication of on-chip three-dimensional (3D) microcoils inside fused silica. The… 
2010
2010
A Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope With Decoupled Comb Drive Operating at Atmospheric Pressure
In this paper, a silicon bulk micromachined lateral-axis tuning-fork gyroscope (TFG) with a decoupled comb drive and torsional… 
2010
2010
Development of a High-Performance Microelectrostatic Repulsive-Force Rotation Actuator
A high-performance microelectrostatic repulsive-force rotation actuator is developed and tested. A model of the actuator is also… 
2009
2009
Neural Network Modeling and Particle Swarm Optimization ( PSO ) of Process Parameters in Pulsed Laser Micromachining of Hardened AISI H 13 Steel
Neural Network Modeling and Particle Swarm Optimization (PSO) of Process Parameters in Pulsed Laser Micromachining of Hardened… 
Highly Cited
2004
Highly Cited
2004
Surface patterning of silica nanostructures using bio-inspired templates and directed synthesis.
Natural systems excel in directing the synthesis of inorganic materials for various functional purposes. One of the best-studied… 
2004
2004
Fabrication of miniaturized fluidic devices using SU-8 based lithography and low temperature wafer bonding
In this paper, we present a technology for the batch-fabrication of fluidic devices which combines polymer and metal layers. The… 
2000
2000
The influence of coating structure on micromachine stiction
Stiction and friction in micromachines is commonly inhibited through the use of silane coupling agents such as 1H-, 1H-, 2H-, 2H… 
1997
1997
LASER MICROMACHINING OF SILICON: A NEW TECHNIQUE FOR FABRICATING HIGH QUALITY TERAHERTZ WAVEGUIDE COMPONENTS'
One of the main obstacles encountered in designing low noise, high efficiency, heterodyne receivers and local oscillator sources… 
1995
1995
Surface‐micromachined free‐space micro‐optical systems containing three‐dimensional microgratings
Free‐space micro‐optical systems on a chip containing three‐dimensional microgratings have been demonstrated using surface… 
1994
1994
Using Micromachining, Molecular Self-Assembly, and Wet Etching to Fabricate 0.1-1-.mu.m-scale structures of Gold and Silicon
In this paper, we report a procedure that combines micromachining,l molecular self-assembly, and wet etching and provides the…