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National Institutes of Health

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2012
2012
開發電漿輔助化學氣相沉積多層SiOxNy:H/SiNx:H抗反射薄膜並應用於矽晶太陽能電池;Multi-layered SiOxNy:H/SiNx:H Antireflection Coating for Silicon Solar Cells by Plasma Enhanced Chemical Vapor Deposition