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Instrumentation Research, Metrology, and Standards for Nanotechnology

Known as: NNI Project Component Area 4, National Nanotechnology Initiative Project Component Area 4 
R&D pertaining to the tools needed to advance nanotechnology research and commercialization, including next-generation instrumentation for… 
National Institutes of Health

Papers overview

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2014
2014
Characterization of radiometric transfer standards based on silicon trap detectors
We present the characterization of the properties of the silicon trap detectors used in the construction of the traceability… 
Review
2013
Review
2013
Automated metrology recipe creation
A Metrology Recipe Automation capability has been have developed and deployed at GLOBALFOUNDRIES with the objective to support… 
2010
2010
Monitoring hepatitis C virus (HCV) RNA-dependent RNA polymerase oligomerization by a FRET-based in vitro system.
2007
2007
White-light interferometry using a channeled spectrum. 2. Calibration methods, numerical and experimental results.
In the companion paper, [Appl. Opt. 46, 5853 (2007)] a highly accurate white light interference model was developed from just a… 
2007
2007
Performance of Workstation With Offline and Integrated Metrology
One of the present developments in the semiconductor industry is integration of metrology tools in the main process tool, instead… 
2005
2005
Analysis and Numerical Modeling of Error Sources in SIM Star Light Phase Detection
The Space Interferometry Mission (SIM), scheduled to launch in 2010, will perform precision astrometry by interfering starlight… 
2004
2004
Subnanometer level model validation of the SIM interferometer
The Space Interferometer Mission (SIM) flight instrument will not undergo a full performance, end-to-end system test on the… 
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