Skip to search formSkip to main contentSkip to account menu

Cymer

National Institutes of Health

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2017
2017
Extreme ultraviolet (EUV) lithography produces 13.5 nm light by irradiating a droplet of molten Sn with a laser, creating a dense… 
2016
2016
The quest for an integrated light source that promises high energy efficiency and a fast modulation for high-performance photonic… 
2013
2013
Environmental planning is complex, and requires careful consideration of a large number of factors, including quantitative ones… 
Review
2012
Review
2012
Optofluidics integrates the fields of photonics and microfluidics, providing new freedom to both fields and permitting the… 
2011
2011
We demonstrate a micro-resonator based on a channel waveguide terminated with metallic mirrors side coupled to a bus waveguide… 
2009
2009
This paper is devoted to the development of laser produced plasma (LPP) EUV source architecture for advanced lithography… 
2009
2009
Leading-edge scanners in fabs worldwide have particularly high system utilization and require peak levels of system throughput… 
2008
2008
This paper applies process and circuit simulation to examine plausible explanations for measured differences in ring oscillator… 
2005
2005
The EUV light source has been characterized as the top-priority critical issue facing the viability of EUV lithography. Cymer's… 
2004
2004
This paper will summarize over 10 years of solid state pulsed power development at Cymer Inc. associated with power systems for…