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Cymer

 
National Institutes of Health

Papers overview

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2017
2017
Summary: Here we present open‐source software for the analysis of high‐dimensional cytometry data using state of the art… Expand
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2017
2017
Extreme ultraviolet (EUV) lithography produces 13.5 nm light by irradiating a droplet of molten Sn with a laser, creating a dense… Expand
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2016
2016
The quest for an integrated light source that promises high energy efficiency and a fast modulation for high-performance photonic… Expand
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2016
2016
We present experimental results on the observation of a bulk second-order nonlinear susceptibility, derived from both free-space… Expand
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2011
2011
We demonstrate a micro-resonator based on a channel waveguide terminated with metallic mirrors side coupled to a bus waveguide… Expand
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2009
2009
This paper is devoted to the development of laser produced plasma (LPP) EUV source architecture for advanced lithography… Expand
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2009
2009
Leading-edge scanners in fabs worldwide have particularly high system utilization and require peak levels of system throughput… Expand
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2008
2008
This paper applies process and circuit simulation to examine plausible explanations for measured differences in ring oscillator… Expand
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2005
2005
The EUV light source has been characterized as the top-priority critical issue facing the viability of EUV lithography. Cymer's… Expand
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2004
2004
This paper will summarize over 10 years of solid state pulsed power development at Cymer Inc. associated with power systems for… Expand
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