Cymer
National Institutes of Health
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Summary: Here we present open‐source software for the analysis of high‐dimensional cytometry data using state of the art…
In response to significant neon supply constraints, Cymer has responded with a multi-part plan to support its customers. Cymer’s…
Leading-edge scanners in fabs worldwide have particularly high system utilization and require peak levels of system throughput…
Tighter CD control requirements of the smaller devices in modern semiconductor products demand control of all potential sources…
Dynamics of laser-produced Sn-based plasmas were investigated for a monochromatic EUV lithography (EUVL) source. A hollow plasma…
We report on the approach for a high-power high-beam-quality drive laser system that is used for a laser-produced plasma (LPP…
We intended to use deposition-free target such as cryogenic Xe target as a laser produced plasma EUV source. We reported an…
This paper will summarize over 10 years of solid state pulsed power development at Cymer Inc. associated with power systems for…
Since the initial demonstration of EUV emission with Xenon as a source gas in Cymer's Dense Plasma Focus (DPF) device…
Recent advances in the Dense Plasma Focus (DPR) under investigation by Cymer as an EUV light source have increased both the total…