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Bacillus sp. F57

National Institutes of Health

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2004
2004
基于SEMI F57-0301标准的流体组件材料选择、设计、生产和测试
本文阐述了应用在半导体行业超高纯水系统和液体化学分配系统上的含氟聚合物阀门，包括它的材料的选择、设计、生产和测试等问题。并针对半导体工业发展的需求，以SEMI F57-0301… 
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