Key issues in automatic classification of defects in post-inspection review process of photomasks

@inproceedings{Pereira2012KeyII,
  title={Key issues in automatic classification of defects in post-inspection review process of photomasks},
  author={Mark Pereira and Manabendra Maji and Ravi R. Pai and Samir B. V. R. and Seshadri R and Pradeepkumar Patil},
  booktitle={Photomask Technology},
  year={2012},
  url={https://api.semanticscholar.org/CorpusID:110807840}
}
Automatic Defect Classification tool (NxADC) which is in advanced stage of development as part of NxDAT1, can automatically classify defects accurately and consistently in very less amount of time, compared to a human operator.
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5 Citations
Background Citations
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Methods Citations
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5 Citations

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17 References

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