silicon tetrafluoride

Known as: SiF4 
 
National Institutes of Health

Papers overview

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2014
2014
Silicon Tetrafluoride (SiF<sub>4</sub>) is a dopant gas of choice for different silicon ion implantation processes used in… (More)
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2014
2014
We have conducted an extensive computational study of the structural and energetic properties of select acetonitrile-Group IV (A… (More)
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2011
2011
Hydrogen fluoride (HF) is a hazardous compound used in a variety of industrial processes and is a decomposition product of many… (More)
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2005
2005
Silicon tetrafluoride (SiF4) is observed in terrestrial volcanic gases and is predicted to be the major F – bearing species in… (More)
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2003
2003
Characteristics of fluoride emission from 12 soils at temperatures of 400-1,100 degrees C related to the brick-making process… (More)
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2002
2002
Sulfur hexafluoride (SFd)-contained gas is a common pollutant emitted during the etching process used in the semiconductor… (More)
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1998
1998
A method for the determination of silicon by inductively coupled plasma atomic emission spectrometry (ICP-AES) is described. The… (More)
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1996
1996
A procedure for the purification, recovery, and determination of isotopic abundances of silicon from biogenic and lithogenic… (More)
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1986
1986
The formation of decomposition by-products produced by electrical spark discharges in SF6 has been investigated by quadrupole… (More)
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