Wafer (electronics)

Known as: Wafer (semiconductor), Semiconductor wafer, Thick film 
A wafer, also called a slice or substrate, is a thin slice of semiconductor material, such as a crystalline silicon, used in electronics for the… (More)
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Papers overview

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Highly Cited
2010
Highly Cited
2010
Three-dimensional ICs provide a promising option to build high-performance compact SoCs by stacking one or more chips vertically… (More)
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Highly Cited
2008
Highly Cited
2008
The main challenges of today's device packaging are miniaturization, continuously increasing operating frequencies/high data… (More)
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Highly Cited
2008
Highly Cited
2008
  • E. Esashi
  • TRANSDUCERS - International Solid-State Sensors…
  • 2008
Wafer level packaging methods of MEMS are described. These play important roles to reduce cost and to improve reliability. MEMS… (More)
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Highly Cited
2006
Highly Cited
2006
The rationale and development of a wafer-scale three-dimensional (3-D) integrated circuit technology are described. The essential… (More)
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Highly Cited
2003
Highly Cited
2003
This paper introduces a new method for fabricating capacitive micromachined ultrasonic transducers (CMUTs) that uses a wafer… (More)
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Highly Cited
2000
Highly Cited
2000
This paper describes a fabrication technique for building three-dimensional (3-D) micro-channels in polydimethylsiloxane (PDMS… (More)
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Highly Cited
2000
Highly Cited
2000
A three-dimensional serpentine microchannel design with a "C shaped" repeating unit is presented in this paper as a means of… (More)
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Highly Cited
1998
Highly Cited
1998
When mirror-polished, flat, and clean wafers of almost any material are brought into contact at room temperature, they are… (More)
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Highly Cited
1991
Highly Cited
1991
A powerful new verification technique determines the measurement accuracy of scattering parameter calibrations. The technique… (More)
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Highly Cited
1979
Highly Cited
1979
A miniature gas analysis system has been built based on the principles of gas chromatography (GC). The major components are… (More)
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