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Vapour phase decomposition

Known as: VPD, Vapor phase decomposition 
Vapour phase decomposition (VPD) is a method used in the semiconductor industry to improve the sensitivity of total-reflection X-ray fluorescence… Expand
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Papers overview

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2012
2012
The photoinduced vapor-phase decomposition of formic acid was investigated on pure, N-doped and metal-promoted TiO2. The… Expand
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2011
2011
Abstract The photo-induced vapor-phase decomposition of ethanol was investigated on pure, N-doped, and metal-promoted TiO 2 . The… Expand
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Highly Cited
2011
Highly Cited
2011
The vapor-phase decomposition of formic acid was investigated over Pt metals supported on inert carbon Norit with the aim of… Expand
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Highly Cited
2011
Highly Cited
2011
The vapor-phase decomposition of formic acid was studied over Au supported on various materials, with the aim of producing CO… Expand
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Highly Cited
2010
Highly Cited
2010
The vapor phase decomposition of formic acid was studied over supported Mo2C catalysts in a flow system. Mo2C deposited on silica… Expand
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Highly Cited
2009
Highly Cited
2009
The vapor signature of diacetone diperoxide (DADP) and hexamethylene triperoxide diamine (HMTD) were examined by a gas… Expand
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2008
2008
Abstract In this contribution, a sequential and hierarchical approach for the feasibility analysis and the preliminary design of… Expand
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Review
2005
Review
2005
Advanced process technologies have been introducing many unseen problems on process yield and device reliability… Expand
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2005
2005
Experimental data on the synthesis of crystalline Cu, Cu2O, and CuO nanoparticles obtained earlier by the vapor-phase… Expand
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1999
1999
気相分解(VPD)を組み合わせた全反射蛍光X線分析(TXRF), VPD/TXRF法によって, Siウェハー上の極微量Na及びAlの分析を行った. Na及びAlの高感度分析を行うために, W-Mα線を用いてTXRF測定を行った.従来のTXRF… Expand