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Thermal oxidation
Known as:
HTO
, High Temperature Oxide
, Thermal oxide
In microfabrication, thermal oxidation is a way to produce a thin layer of oxide (usually silicon dioxide) on the surface of a wafer. The technique…
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Related topics
Related topics
15 relations
Chemical vapor deposition
Dangling bond
Deal–Grove model
Dopant
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Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
2012
2012
Study of Photoinduced Interaction between Calf Thymus-DNA and Bovine Serum Albumin Protein with H2Ti3O7 Nanotubes
R. Chakraborty
,
Sriparna Chatterjee
,
S. Sarkar
,
P. Chattopadhyay
2012
Corpus ID: 264252119
Hydrogen titanate nanotubes were synthesized by hydrothermal process using 10 M NaOH and TiO2 anatase powder. The material…
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2011
2011
5 nm gap via conventional photolithography and pattern-size reduction technique
S. Dhahi
,
Md. Eaqub Ali
,
U. Hashim
,
A. Saif
2011
Corpus ID: 53557613
A simple method for the fabrication of nanogaps of less than 6 nm by conventional photolithography combined with patterned-size…
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2005
2005
Revealing the Substructure of Single-Walled Carbon Nanotube Fibers
YuHuang Wang
,
L. Ericson
,
+9 authors
R. Smalley
2005
Corpus ID: 4828590
Single-walled carbon nanotubes (SWNTs) uniquely combine characteristics of polymers (e.g., they are molecules composed of repeat…
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2004
2004
Self-aligned, insulating-layer structure for integrated fabrication of organic self-assembled multilayer electronic devices
T. Graves-abe
,
Zhenan Bao
,
J. Sturm
2004
Corpus ID: 136954915
We demonstrate an approach for fabricating nanometer-scale devices with minimal device areas while still retaining compatibility…
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2003
2003
The Biosafety Protocol and the WTO
Olivette Rivera-Torres
2003
Corpus ID: 55199659
Just a few Yotes shy of entering into force, the Cartagena Protocol on Biosafety is poised to become the next multilateral…
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2000
2000
Sorption and Migration of Radionuclides in granite (HRL ÄSPÖ, Sweden)
P. Vejmelka
,
T. Fanghaenel
,
+4 authors
R. Artinger
2000
Corpus ID: 55954584
Within the scope of a bilateral cooperation an Actinide Migration Experiment is planned by INE to be performed at the Äspö Hard…
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1988
1988
Blocking of silicon oxidation by low-dose nitrogen implantation
K. Schott
,
K. Hofmann
,
M. Schulz
1988
Corpus ID: 56472644
The oxidation characteristics of silicon implanted with a low dose of nitrogen (1–3×1015cm−2) have been studied for dry oxidation…
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1984
1984
Outline of SONNE Cruise SO-17 on the Chatham Rise phosphorite deposits east of New Zealand
U. Rad
1984
Corpus ID: 54796281
[AbrlB der SONNE-Fahrt SO-17 zu den Phosphoriten des Chatham-Ruckens ostlich von Neuseeland] K u r z f a s s u n g : Auf dem…
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1983
1983
Transformations of antioxidants during processing
G. Scott
1983
Corpus ID: 55015347
Abstract
1963
1963
Tritiation of aromatics by HTO-promoted aluminum chloride
C. Măntescu
,
A. Balaban
1963
Corpus ID: 94901769
The effects of tritiated water on derivatives of benzene and pyridine in the presence of aluminum chloride were investigated. The…
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