Thermal oxidation

Known as: HTO, High Temperature Oxide, Thermal oxide 
In microfabrication, thermal oxidation is a way to produce a thin layer of oxide (usually silicon dioxide) on the surface of a wafer. The technique… (More)
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Papers overview

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2014
2014
In this work, a zinc nitride (ZnN) film was deposited at room temperature and subjected to pulse mode rapid thermal oxidation… (More)
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Highly Cited
2013
Highly Cited
2013
PURPOSE To analyze the results of the use of intra-articular cultured autologous bone marrow-derived mesenchymal stem cell (MSC… (More)
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2010
2010
Silicon surfaces are very effectively passivated by silicon thermal oxides. Silicon thermal oxides are grown in a dry oxygen… (More)
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2006
2006
We fabricated silicon-on-insulator (SOI) pressure sensors intended for operation in a wide temperature range. After the thermal… (More)
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2004
2004
Single crystal silicon beams of sub-micron thickness were fabricated from the device layer of SIMOX type silicon-on-insulator… (More)
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2001
2001
  • 2001
Ideally, the flue gas resulting from high-temperature oxidation of hydrocarbons (HC) contains CO 2 , H 2 O, N 2 , O 2 and some… (More)
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Highly Cited
1998
Highly Cited
1998
Ž . Ž . Ž . We compared the persulfate PO , ultraviolet UV , and high temperature oxidation HTO methods used to analyze total… (More)
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1997
1997
A new numerical formulation to model oxidation is proposed. It includes discontinuous shape functions to model two material… (More)
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Highly Cited
1994
Highly Cited
1994
Enhanced performance is demonstrated in n-type metal-oxide-semiconductor field-effect transistors with channel regions formed by… (More)
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1985
1985
A general numerical model, which is suitable to describe nonuniform silicon thermal oxidation, is proposed. The oxidant diffusion… (More)
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