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Sputter cleaning

Known as: Cleaning 
Sputter cleaning is the cleaning of a solid surface in a vacuum by using physical sputtering of the surface. Sputter cleaning is often used in vacuum… 
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Related topics

Related topics

3 relations
Ion platingPlasma cleaningVacuum deposition

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2013
2013
Characterization of vertical buried defects using lock-in vibrothermography: II. Inverse problem
An inversion procedure is presented to reconstruct buried heat sources (revealing defects) from surface temperature data obtained… 
Highly Cited
2010
Highly Cited
2010
Subwavelength Si nanowire arrays for self-cleaning antireflection coatings
Galvanic wet etching was adopted to fabricate Si nanowire arrays (NWAs) as a near-perfect subwavelength structure (SWS), which is… 
Highly Cited
2005
Highly Cited
2005
Harvesting and Transport of Root Biomass from Fast-growing Poplar Plantations
Spinelli, R., Nati, C. & Magagnotti, N. 2005. Harvesting and transport of root biomass from fast-growing poplar plantations… 
2004
2004
Gold/carbon composite tubes and gold nanowires by impregnating templates with hydrogen tetrachloroaurate/acetone solutions
Carbon/gold composite nanotubes as well as gold nanorods were synthesized by the impregnation of porous alumina with diluted… 
Highly Cited
2003
Highly Cited
2003
Ge MOS characteristics with CVD HfO/sub 2/ gate dielectrics and TaN gate electrode
In this paper, we report for the first time Ge MOS characteristics with ultra thin rapid thermal CVD HfO/sub 2/ gate dielectrics… 
Highly Cited
2000
Highly Cited
2000
Detailed characterization of anodic bonding process between glass and thin-film coated silicon substrates
Review
1997
Review
1997
An Outbreak of Hematopoietic and Reproductive Disorders Due to Solvents Containing 2‐Bromopropane in an Electronic Factory, South Korea: Epidemiological Survey
An Outbreak of Hematopoietic and Reproductive Disorders Due to Solvents Containing 2‐Bromopropane in an Electronic Factory, South… 
Review
1992
Review
1992
Development and applications of compact high‐intensity lasers
The development of compact high‐intensity lasers, made possible by the technique of chirped pulse amplification, is reviewed… 
Highly Cited
1991
Highly Cited
1991
Role of toothpastes in the cleaning of teeth.
Toothpastes have improved significantly over the last 2000 years to the point where they are very proficient in their cleaning… 
1988
1988
Oxidation catalysis on YBa2Cu3O6+x
Mild oxidation catalysts are used to product a wide range industrial chemicals from hydrocarbons, whereas deep oxidation… 
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