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Secondary ion mass spectrometry

Known as: Secondary ionization, Secondary-ion mass spectrometry, Liquid secondary ionization 
Secondary ion mass spectrometry (SIMS) is a technique used to analyze the composition of solid surfaces and thin films by sputtering the surface of… 
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Related topics

Related topics

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Focused ion beamIon beamMetabolomicsMicrochannel plate detector

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2004
2004
Recent Developments on Secondary Ion Mass Spectrometry
Secondary ion mass spectrometry(SIMS) is more sensitive than other surface microregion analysis instrumentals. Because the… 
2001
2001
Secondary Ion Mass Spectrometry of Small-Molecule Solids at Cryogenic Temperatures. 2. Rare Gas Solids
: Secondary ion mass spectra of neat solid argon, krypton, and xenon were measured as a function of the nature and energy of the… 
Highly Cited
2000
Highly Cited
2000
Effects of NH/sub 3/-plasma nitridation on the electrical characterizations of low-k hydrogen silsesquioxane with copper interconnects
The interaction between copper interconnects and low-k hydrogen silsesquioxane (HSQ) film was investigated using a Cu/HSQ/Si… 
Review
1994
Review
1994
Studies of adhesion by secondary ion mass spectrometry
The study of adhesion requires the characterization of surfaces and interfaces. One surface analytical technique which has been… 
Highly Cited
1987
Highly Cited
1987
Electrical and physical characteristics of thin nitrided oxides prepared by rapid thermal nitridation
Ultrathin oxides (5-12 nm) were nitrided by lamp-heated rapid thermal annealing in ammonia at temperatures of 900-1150°C for 5… 
Highly Cited
1986
Highly Cited
1986
The Compositional And Structural Properties Of Sprayed Sno2:f Thin Films
1984
1984
Analysis for rare earth elements in accessory minerals by specimen isolated secondary ion mass spectrometry
The distribution of rare earth elements (REEs) in minerals and mineral assemblages is of considerable geochemical significance… 
Review
1980
Review
1980
Direct measurement by secondary-ion mass spectrometry of self-diffusion of boron in Fe40Ni40B20 glass
The available methods for measuring diffusion rates of various metalloids in metallic glasses are critically reviewed, and the… 
1979
1979
Secondary Ion Mass Spectrometry at Close to Single-Atom Concentration Using DC Accelerators
Experiments have been conducted which show that secondary ion mass spectrometry (SIMS), together with the addition of a rather… 
Highly Cited
1969
Highly Cited
1969
Expulsion d'un électron lié dûe au choc de deux atomes d'un métal
In this paper, we continue our study of the kinetic emission of secondary ions, the mechanism of which can be summarized in the… 
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