SECS/GEM

Known as: Generic Equipment Model 
The SECS/GEM is the semiconductor's equipment interface protocol for equipment-to-host data communications. In an automated fab, the interface can… (More)
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Topic mentions per year

Topic mentions per year

2002-2016
0120022016

Papers overview

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2017
2017
This paper discusses the approaches the OSRAM OS Malaysia team took to implement a low cost factory automation in our mixed mode… (More)
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2017
2017
As the semiconductor manufacturing technology advances, the size of a wafer becomes bigger and the critical dimension becomes… (More)
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2016
2016
Integration of modern IT-solutions with available 200mm SECS/GEM events has resulted in `smart solutions' to operate our high-mix… (More)
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2007
2007
In today's semiconductor manufacturing, recipe is a very important portion of the machine system. With that in mind, there is a… (More)
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2002
2002
Introduction Texas Instruments (TI) is currently contracted bY the Air Force Wright Laboratory and the Defense Advanced Research… (More)
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