FAQ

Plasma-immersion ion implantation

Known as: Plasma Immersion Ion Implantataion, Plasma Immersion Ion Implantation 
Plasma-immersion ion implantation (PIII) or pulsed-plasma doping (pulsed PIII) is a surface modification technique of extracting the accelerated ions… (More)
Wikipedia

Topic mentions per year

Topic mentions per year

1997-2016
024619972016

Related topics

Related topics

9 relations
Capacitively coupled plasmaDiodeGridIon implantation
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Broader (2)

Reactive-ion etchingSemiconductor device fabrication

Related mentions per year

Related mentions per year

1937-2018
19401960198020002020
Plasma-immersion ion implantation
Semiconductor device fabrication
Diode
Power supply
Resultant
Wafer

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2015
2015
Improved NiSi contacts on Si by CF4 plasma immersion ion implantation for 14nm node MOSFETs
We present in this paper high quality thin NiSi contacts on Si for the 16nm node using pre-silicidation CF<sub>4</sub> Plasma… (More)
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2014
2014
High-Performance Multilevel Resistive Switching Gadolinium Oxide Memristors With Hydrogen Plasma Immersion Ion Implantation Treatment
Multilevel resistive switching (RS) of gadolinium oxide (Gd<sub>x</sub>O<sub>y</sub>) memristors treated by hydrogen plasma… (More)
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2014
2014
High temperature Plasma Immersion Ion Implantation of AsH3 using PULSION&#x00AE;
Plasma immersion ion implantation (PIII) technology is an alternative that overcomes the limitations of conventional beam line… (More)
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2012
2012
Simulation of BF3 Plasma Immersion Ion Implantation into Silicon
Plasma immersion ion implantation from a BF3 plasma into crystalline (100) silicon was performed using the PULSION plasma doping… (More)
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Review
2011
Review
2011
Plasma Immersion Ion Implantation (PIII) Process - Physics AND Technology
  • Dushyant Gupta
  • 2011
Plasma Immersion Ion Implantation (PIII) is a versatile process technology with its vast applications in materials engineering… (More)
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2008
2008
Faraday/Ion Mass Spectroscopy Dosimeter for Plasma Immersion Ion Implantation/Plasma Doping Processes of Semiconductor Manufacturing
A new method and apparatus called Faraday/ion mass spectroscopy (IMS) dosimeter system is developed and can be used to determine… (More)
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2006
2006
Numerical Simulation of Magnetic-Field-Enhanced Plasma Immersion Ion Implantation in Cylindrical Geometry
Recent studies have demonstrated that the sheath dynamics in plasma immersion ion implantation (PIII) is significantly affected… (More)
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2004
2004
Improvements of Ultra-High Molecular Weight Polyethylene Mechanical Properties by Nitrogen Plasma Immersion Ion Implantation
Nitrogen Plasma Immersion Ion Implantation (PIII) has been used to modify the surface chemical structure of Ultra High Molecular… (More)
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2004
2004
Blood Compatibility of Titanium-Based Coatings Prepared by Metal Plasma Immersion Ion Implantation and Deposition
In this work the suitability of some Tibased coatings as coating for blood-contacting implants is analyzed. Layers of pure Ti, Ti… (More)
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Review
2001
Review
2001
From Plasma Immersion Ion Implantation to Deposition: A Historical Perspective on Principles and Trends
From Plasma Immersion Ion Implantation to Deposition: A Historical Perspective on Principles and Trends André Anders Lawrence… (More)
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