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Plasma-immersion ion implantation

Known as: Plasma Immersion Ion Implantataion, Plasma Immersion Ion Implantation 
Plasma-immersion ion implantation (PIII) or pulsed-plasma doping (pulsed PIII) is a surface modification technique of extracting the accelerated ions… Expand
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Related topics

Related topics

9 relations
Capacitively coupled plasmaDiodeGrid (graphic design)Ion implantation
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Broader (2)

Reactive-ion etchingSemiconductor device fabrication

Papers overview

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2014
2014
Effects of zirconium and nitrogen plasma immersion ion implantation on the electrochemical corrosion behavior of Mg–Y–RE alloy in simulated body fluid and cell culture medium
Abstract The effects of dual Zr & N plasma immersion ion implantation (PIII) on the corrosion behavior of WE43Mg alloy are… Expand
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2005
2005
Surface modification of polymeric materials by plasma immersion ion implantation
Abstract Polymer surfaces typically have low surface tension and high chemical inertness and so they usually have poor wetting… Expand
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Review
2004
Review
2004
Handbook of plasma immersion ion implantation and deposition
Introduction (J. Conrad). FUNDAMENTALS. Fundamentals of Plasmas and Sheaths (M. Lieberman). Ion Implantation and Thin-Film… Expand
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2004
2004
Evaporation–glow discharge hybrid source for plasma immersion ion implantation
Abstract The plasma ion sources play a very important role in the plasma immersion ion implantation (PIII) process. In this paper… Expand
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2001
2001
Third-generation plasma immersion ion implanter for biomedical materials and research
A third generation plasma immersion ion implanter dedicated to biomedical materials and research has been designed and… Expand
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2001
2001
Metallic contamination in hydrogen plasma immersion ion implantation of silicon
In plasma immersion ion implantation (PIII), ions bombard all surfaces inside the PIII vacuum chamber, especially the negatively… Expand
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2001
2001
Heat balance during plasma immersion ion implantation
The substrate temperature was measured during plasma immersion ion implantation (PIII) of nitrogen as a function of the pulse… Expand
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1999
1999
Special modulator for high frequency, low-voltage plasma immersion ion implantation
Plasma immersion ion implantation is a burgeoning surface modification technique and not limited by the line-of-sight restriction… Expand
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1995
1995
Buried oxide formation by plasma immersion ion implantation
Abstract Although separation by implantation of oxygen (SIMOX) is an attractive approach for fabricating silicon-on-insulator… Expand
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1990
1990
Plasma Immersion Ion Implantation and
We have demonstrated gettering of metallic impurities in silicon wafers with plasma immersion ion implantation (PIII). Ar or Ne… Expand
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