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Plasma-immersion ion implantation
Known as:
Plasma Immersion Ion Implantataion
, Plasma Immersion Ion Implantation
Â
Plasma-immersion ion implantation (PIII) or pulsed-plasma doping (pulsed PIII) is a surface modification technique of extracting the accelerated ions…Â
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Wikipedia
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Topic mentions per year
1997-2016
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2016
Related topics
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9 relations
Capacitively coupled plasma
Diode
Grid
Ion implantation
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Broader (2)
Reactive-ion etching
Semiconductor device fabrication
Related mentions per year
Related mentions per year
1937-2018
1940
1960
1980
2000
2020
Plasma-immersion ion implantation
Semiconductor device fabrication
Diode
Power supply
Resultant
Wafer
Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
2015
2015
Improved NiSi contacts on Si by CF4 plasma immersion ion implantation for 14nm node MOSFETs
Haitao Zhang
,
Julian Duchaine
,
+5 authors
Qing-Tai Zhao
2015 IEEE International Interconnect Technology…
2015
We present in this paper high quality thin NiSi contacts on Si for the 16nm node using pre-silicidation CF<sub>4</sub> Plasma…Â
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2014
2014
High-Performance Multilevel Resistive Switching Gadolinium Oxide Memristors With Hydrogen Plasma Immersion Ion Implantation Treatment
Jer-Chyi Wang
,
Chih-Hsien Hsu
,
Yu-Ren Ye
,
Chao-Sung Lai
,
Chi-Fong Ai
,
Wen-Fa Tsai
IEEE Electron Device Letters
2014
Multilevel resistive switching (RS) of gadolinium oxide (Gd<sub>x</sub>O<sub>y</sub>) memristors treated by hydrogen plasma…Â
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2014
2014
High temperature Plasma Immersion Ion Implantation of AsH3 using PULSION®
F. Torregrosa
,
Julian Duchaine
,
+4 authors
Allen Mcteer
2014 20th International Conference on Ion…
2014
Plasma immersion ion implantation (PIII) technology is an alternative that overcomes the limitations of conventional beam line…Â
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2012
2012
Simulation of BF3 Plasma Immersion Ion Implantation into Silicon
Alexandr N. Burenkov
,
Angelika F G Hahn
,
F. Torregrosa
2012
Plasma immersion ion implantation from a BF3 plasma into crystalline (100) silicon was performed using the PULSION plasma doping…Â
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Review
2011
Review
2011
Plasma Immersion Ion Implantation (PIII) Process - Physics AND Technology
Dushyant Gupta
2011
Plasma Immersion Ion Implantation (PIII) is a versatile process technology with its vast applications in materials engineering…Â
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2008
2008
Faraday/Ion Mass Spectroscopy Dosimeter for Plasma Immersion Ion Implantation/Plasma Doping Processes of Semiconductor Manufacturing
Shu Qin
,
Allen Mcteer
IEEE Transactions on Plasma Science
2008
A new method and apparatus called Faraday/ion mass spectroscopy (IMS) dosimeter system is developed and can be used to determine…Â
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2006
2006
Numerical Simulation of Magnetic-Field-Enhanced Plasma Immersion Ion Implantation in Cylindrical Geometry
K. G. Kostov
,
J. J. Barroso
IEEE Transactions on Plasma Science
2006
Recent studies have demonstrated that the sheath dynamics in plasma immersion ion implantation (PIII) is significantly affected…Â
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2004
2004
Improvements of Ultra-High Molecular Weight Polyethylene Mechanical Properties by Nitrogen Plasma Immersion Ion Implantation
A. R. Marcondes
,
M. Ueda
,
+4 authors
Carlos MaurÃcio Lepienski
2004
Nitrogen Plasma Immersion Ion Implantation (PIII) has been used to modify the surface chemical structure of Ultra High Molecular…Â
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2004
2004
Blood Compatibility of Titanium-Based Coatings Prepared by Metal Plasma Immersion Ion Implantation and Deposition
I. A. Tsyganov
,
Manfred F Maitz
,
Eva Wieser
2004
In this work the suitability of some Tibased coatings as coating for blood-contacting implants is analyzed. Layers of pure Ti, Ti…Â
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Review
2001
Review
2001
From Plasma Immersion Ion Implantation to Deposition: A Historical Perspective on Principles and Trends
André Anders
2001
From Plasma Immersion Ion Implantation to Deposition: A Historical Perspective on Principles and Trends André Anders Lawrence…Â
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