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Plasma-immersion ion implantation

Known as: Plasma Immersion Ion Implantataion, Plasma Immersion Ion Implantation 
Plasma-immersion ion implantation (PIII) or pulsed-plasma doping (pulsed PIII) is a surface modification technique of extracting the accelerated ions… Expand
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Papers overview

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2014
2014
Abstract The effects of dual Zr & N plasma immersion ion implantation (PIII) on the corrosion behavior of WE43Mg alloy are… Expand
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2005
2005
Abstract Polymer surfaces typically have low surface tension and high chemical inertness and so they usually have poor wetting… Expand
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Review
2004
Review
2004
Introduction (J. Conrad). FUNDAMENTALS. Fundamentals of Plasmas and Sheaths (M. Lieberman). Ion Implantation and Thin-Film… Expand
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2004
2004
Abstract The plasma ion sources play a very important role in the plasma immersion ion implantation (PIII) process. In this paper… Expand
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2001
2001
A third generation plasma immersion ion implanter dedicated to biomedical materials and research has been designed and… Expand
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2001
2001
In plasma immersion ion implantation (PIII), ions bombard all surfaces inside the PIII vacuum chamber, especially the negatively… Expand
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2001
2001
The substrate temperature was measured during plasma immersion ion implantation (PIII) of nitrogen as a function of the pulse… Expand
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1999
1999
Plasma immersion ion implantation is a burgeoning surface modification technique and not limited by the line-of-sight restriction… Expand
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1995
1995
Abstract Although separation by implantation of oxygen (SIMOX) is an attractive approach for fabricating silicon-on-insulator… Expand
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1990
1990
We have demonstrated gettering of metallic impurities in silicon wafers with plasma immersion ion implantation (PIII). Ar or Ne… Expand
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