Plasma-immersion ion implantation

Known as: Plasma Immersion Ion Implantataion, Plasma Immersion Ion Implantation 
Plasma-immersion ion implantation (PIII) or pulsed-plasma doping (pulsed PIII) is a surface modification technique of extracting the accelerated ions… (More)
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Topic mentions per year

Topic mentions per year

1997-2016
024619972016

Papers overview

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2015
2015
We present in this paper high quality thin NiSi contacts on Si for the 16nm node using pre-silicidation CF<sub>4</sub> Plasma… (More)
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2014
2014
Multilevel resistive switching (RS) of gadolinium oxide (Gd<sub>x</sub>O<sub>y</sub>) memristors treated by hydrogen plasma… (More)
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2014
2014
Plasma immersion ion implantation (PIII) technology is an alternative that overcomes the limitations of conventional beam line… (More)
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2012
2012
Plasma immersion ion implantation from a BF3 plasma into crystalline (100) silicon was performed using the PULSION plasma doping… (More)
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Review
2011
Review
2011
  • Dushyant Gupta
  • 2011
Plasma Immersion Ion Implantation (PIII) is a versatile process technology with its vast applications in materials engineering… (More)
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2008
2008
A new method and apparatus called Faraday/ion mass spectroscopy (IMS) dosimeter system is developed and can be used to determine… (More)
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2006
2006
Recent studies have demonstrated that the sheath dynamics in plasma immersion ion implantation (PIII) is significantly affected… (More)
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2004
2004
Nitrogen Plasma Immersion Ion Implantation (PIII) has been used to modify the surface chemical structure of Ultra High Molecular… (More)
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2004
2004
In this work the suitability of some Tibased coatings as coating for blood-contacting implants is analyzed. Layers of pure Ti, Ti… (More)
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Review
2001
Review
2001
From Plasma Immersion Ion Implantation to Deposition: A Historical Perspective on Principles and Trends André Anders Lawrence… (More)
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