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National Institutes of Health
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The Study of Deposition Parameters, Properties for PVD TixN and CrxN Coatings Using a Closed Field Unbalanced Magnetron Sputter Ion Plating System
Corpus ID: 135588915
Closed Field Unbalanced Magnetron Sputter Ion Plating (CFUBMSIP) systems have been used increasingly for PVD coating in recent…
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