Nanolithography

Lithography that is performed on a nanoscale. Examples of this technique include etching, writing and printing on nanoscale surfaces.
National Institutes of Health

Topic mentions per year

Topic mentions per year

1983-2018
05010019832018

Papers overview

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Highly Cited
2008
Highly Cited
2008
The commercialization of nanoscale devices requires the development of high-throughput nanofabrication technologies that allow… (More)
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Highly Cited
2006
Highly Cited
2006
Light is the ultimate means of sending information to and from the interior structure of materials — it packages data in a signal… (More)
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2006
2006
We demonstrate that bowtie apertures can be used for contact lithography to achieve nanometer scale resolution. The bowtie… (More)
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2005
2005
A new nanophotolithography technique based on the interference of surface plasmon waves is proposed and demonstrated by using… (More)
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2004
2004
In this paper, we demonstrate high-density nanolithography by utilizing surface plasmons (SPs). SPs are excited on an aluminum… (More)
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Highly Cited
2003
Highly Cited
2003
Au-nanoclusters between 2 and 8 nm in diameter were deposited onto solid substrates in different pattern geometries. The basis of… (More)
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2003
2003
We report a tip modification strategy coupled with dip-pen nanolithography for depositing proteins on a surface. This methodology… (More)
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Highly Cited
2002
Highly Cited
2002
Dip-pen nanolithography was used to construct arrays of proteins with 100- to 350-nanometer features. These nanoarrays exhibit… (More)
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2001
2001
Collagen is a key fibrous protein in biological systems, characterized by a complex structural hierarchy as well as the ability… (More)
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Highly Cited
1999
Highly Cited
1999
A direct-write "dip-pen" nanolithography (DPN) has been developed to deliver collections of molecules in a positive printing mode… (More)
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