Skip to search formSkip to main contentSkip to account menu

Nanocantilever

The simplest micro-electro-mechanical system (MEMS) that is easily machined and mass-produced for probing nanoscale specimens. These devices are… 
National Institutes of Health

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2016
2016
50 nm thick AlN Films for Actuation and Detection of Nanoscale Resonators
We report on the optimization of a multilayer platinum/aluminum nitride (AlN) stack with an AlN active layer thickness of 50 nm… 
2015
2015
Integrated Silicon Optomechanical Transducers and Their Application in Atomic Force Microscopy
2013
2013
frequencies surface stress by measuring the shifts of resonant Determining the effects of surface elasticity and
References 9.full.html#ref-list-1 http://rspa.royalsocietypublishing.org/content/469/2159/2013044 This article cites 48 articles… 
2013
2013
Modeling and Simulation of Nanocantilever Based Toluene Sensor
This study deals with parametric optimization of cantilever based MEMS devices for the fabrication of toluene gas sensor. Silicon… 
2013
2013
Nanocantilever Property Based on Carbon Nanotubes
The mechanical and geometrical properties of carbon nanotubes (CNT), nanocantilevers beam from single walled carbon nanotube… 
2013
2013
Resonant Nanocantilever Chemical Vapor Sensors
Chemical vapor sensors are used in a wide variety of fields such as security, environmental monitoring, the food and beverage… 
2012
2012
A theoretical study of a nano-opto-mechanical sensor using a photonic crystal-cantilever cavity
In this simulation study, integration of a nanocantilever inside a two-dimensional (2D) photonic crystal (PC) cavity resulted in… 
2009
2009
Design and Fabrication of a Nanocantilever for High-Speed Force Microscopy
Thesis (Master, Physics, Engineering Physics and Astronomy) -- Queen's University, 2009-01-30 14:18:19.893 
2009
2009
Micro- and Nanocantilever Devices and Systems For Biomolecule Detection
2000
2000
Nanocantilever integrated with CMOS circuitry for high sensitivity mass detection
By clicking accept or continuing to use the site, you agree to the terms outlined in our Privacy Policy (opens in a new tab), Terms of Service (opens in a new tab), and Dataset License (opens in a new tab)