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Molecular vapor deposition
Molecular vapor deposition is the gas-phase reaction between surface reactive chemicals and an appropriately receptive surface. Often bi-functional…
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Microelectromechanical systems
Papers overview
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2015
2015
Molecular and Nanoparticles vapor deposition methods to create super hydro/oleophobic surfaces
N. Abidi
,
L. Cabrales
,
P. Aminayi
2015
Corpus ID: 138173297
In this paper, glassslide surfaces were functionalized using nanoparticles vapor deposition (NVD) and molecular vapor deposition…
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2010
2010
Silane decorated metallic nanorods for hydrophobic applications
G. Kannarpady
,
R. Sharma
,
Bo Liu
,
S. Trigwell
,
C. Ryerson
,
A. Biris
2010
Corpus ID: 29430106
2009
2009
Do We Need Better Materials than Teflon in Marking
K. Law
2009
Corpus ID: 139112466
Teflon materials such as PTFE and PFA are generally known to be chemical inert and thermally stable with low surface energy. They…
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2008
2008
Robust Shadow-Mask Evaporation Through Lithographically Defined Undercut in PMMA / PMGI Resist Bilayer
R. Buhrman
,
D. Ralph
,
Zhipan Li
2008
Corpus ID: 34183476
We have developed a new recipe for fabricating a robust two-layer resist stack for shadow-mask evaporation. Instead of using the…
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2006
2006
Vapor deposited release layers for nanoimprint lithography
Tong Zhang
,
B. Kobrin
,
+6 authors
M. Otto
SPIE Advanced Lithography
2006
Corpus ID: 136420984
This paper presents the advantages of using a vapor deposited self-assembled monolayer (SAM) as a mold release layer for nano…
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2005
2005
Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD)
Robert W. Ashurst
,
J. Chinn
,
B. Kobrin
2005
Corpus ID: 139907671
This paper reports on the results of an improved surface modification method called Molecular Vapor Deposition (MVD). MVD allows…
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2005
2005
Molecular vapor deposition (MVD/spl trade/) - a new method of applying moisture barriers for packaging applications
M. Wanebo
,
B. Kobrin
,
F. Helmrich
,
J. Chinn
Proceedings. International Symposium on Advanced…
2005
Corpus ID: 40954959
We propose that a composite hydrophobic SAM film with 100% coverage of all exposed surfaces can be used in many advance packaging…
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2005
2005
Molecular vapor deposition (MVD) for improved SAM coatings
B. Kobrin
,
J. Chinn
,
Robert W. Ashurst
,
R. Maboudian
SPIE MOEMS-MEMS
2005
Corpus ID: 136550281
This paper reports on the results of an improved surface modification method called Molecular Vapor Deposition (MVD). MVD allows…
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2005
2005
Molecular Vapor Deposition (MVD) for Improved SAM Coatings
Kobrin Boris
,
Chinn Jeff
,
W. Robert
,
Maboudian Roya
2005
Corpus ID: 113466385
2004
2004
Molecular Vapor Deposition - An Improved Vapor-Phase Deposition Technique of Molecular Coatings for MEMS Devices
B. Kobrin
,
V. Fuentes
,
+6 authors
R. Maboudian
2004
Corpus ID: 138499167
This paper reports the results of a new surface modification technique called Molecular Vapor Deposition (MVD). The MVD technique…
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