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Molecular vapor deposition

Molecular vapor deposition is the gas-phase reaction between surface reactive chemicals and an appropriately receptive surface. Often bi-functional… Expand
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Microelectromechanical systems

Papers overview

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2015
2015
Molecular and Nanoparticles vapor deposition methods to create super hydro/oleophobic surfaces
In this paper, glassslide surfaces were functionalized using nanoparticles vapor deposition (NVD) and molecular vapor deposition… Expand
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2009
2009
Do We Need Better Materials than Teflon in Marking
  • K. Law
  • 2009
    • Corpus ID: 139112466
Teflon materials such as PTFE and PFA are generally known to be chemical inert and thermally stable with low surface energy. They… Expand
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2008
2008
Robust Shadow-Mask Evaporation Through Lithographically Defined Undercut in PMMA / PMGI Resist Bilayer
We have developed a new recipe for fabricating a robust two-layer resist stack for shadow-mask evaporation. Instead of using the… Expand
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Review
2007
Review
2007
Combined laser texturing and molecular vapor deposition for wetting angle control
In this paper we will discuss various aspects of surface engineering. This is a broad term, and we choose to focus on two aspects… Expand
2006
2006
Vapor deposited release layers for nanoimprint lithography
This paper presents the advantages of using a vapor deposited self-assembled monolayer (SAM) as a mold release layer for nano… Expand
2005
2005
Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD)
This paper reports on the results of an improved surface modification method called Molecular Vapor Deposition (MVD). MVD allows… Expand
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2005
2005
Molecular vapor deposition (MVD/spl trade/) - a new method of applying moisture barriers for packaging applications
We propose that a composite hydrophobic SAM film with 100% coverage of all exposed surfaces can be used in many advance packaging… Expand
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2005
2005
Molecular vapor deposition (MVD) for improved SAM coatings
This paper reports on the results of an improved surface modification method called Molecular Vapor Deposition (MVD). MVD allows… Expand
2005
2005
WATER SLUG DETACHMENT IN TWO-PHASE HYDROPHOBIC MICROCHANNEL FLOWS
In this paper we present a first order study of liquid water detachment and entrainment into air flows in hydrophobic… Expand
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2004
2004
Molecular Vapor Deposition - An Improved Vapor-Phase Deposition Technique of Molecular Coatings for MEMS Devices
This paper reports the results of a new surface modification technique called Molecular Vapor Deposition (MVD). The MVD technique… Expand
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