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Ion beam lithography
Known as:
IBL
, Ion beam projection lithography
, Ion projection lithography
Ion beam lithography is the practice of scanning a focused beam of ions in a patterned fashion across a surface in order to create very small…
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Related topics
Related topics
6 relations
Focused ion beam
Integrated circuit
Microelectromechanical systems
Patterned media
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Broader (1)
Semiconductor device fabrication
Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
2017
2017
Dataset for Helium Ion Beam Lithography on Fullerene Molecular Resists for Sub-10 nm Patterning
Xiaoqing Shi
,
P. Prewett
,
E. Huq
,
D. Bagnall
,
A. Robinson
,
S. Boden
2017
Corpus ID: 38482020
Dataset supporting: Shi, Xiaoqing et al (2016) Helium ion beam lithography on fullerene molecular resists for sub-10 nm…
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2012
2012
Sub-10-nm lithography with light-ion beams
D. Winston
2012
Corpus ID: 21319982
Scanning-electron-beam lithography (SEBL) is the workhorse of nanoscale lithography in part because of the high brightness of the…
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2009
2009
Helium Ion Beam Lithography in the ORION ® PLUS
2009
Corpus ID: 40586071
Direct write lithography is used in all phases of nanotechnology development activities. In research, it is utilized to create…
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2007
2007
Colloidal Lithography and Particle Decoration Metrology
S. D. Hudson
,
Thuy T. Chastek
,
B. Bauer
2007
Corpus ID: 135132332
2004
2004
Focused ion beam direct fabrication of micro-optical elements: features compared with laser beam and electron beam direct writing
Yongqi Fu
,
K. A. Ngoi
2004
Corpus ID: 16107087
ion beam milling (FIB milling), focused ion beam lithography (FIB lithography), and focused ion beam direct deposition (FIB…
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2003
2003
Maskless, Resistless Ion Beam Lithography Processes
Q. Ji
2003
Corpus ID: 176396135
Maskless, Resistless Ion Beam Lithography Processes by Qing Ji B.S. (University of Science and Technology of China) 1993 M.A…
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2002
2002
Nanofabrication of a methacrylate-based polymer on a silicon substrate by using atomic force microscope lithography
M. Son
,
E. Kim
,
Haiwon Lee
2002
Corpus ID: 125616748
1998
1998
Stencil mask technology for ion beam lithography
Albrecht Ehrmann
,
Simon Huber
,
+8 authors
I. Rangelow
Photomask Technology
1998
Corpus ID: 137631583
Ion beam lithography is one of the most promising future lithography technologies. A helium or hydrogen ion beam illuminates a…
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1994
1994
Using Micromachining, Molecular Self-Assembly, and Wet Etching to Fabricate 0.1-1-.mu.m-scale structures of Gold and Silicon
N. Abbott
,
Amit Kumar
,
G. Whitesides
1994
Corpus ID: 18698859
In this paper, we report a procedure that combines micromachining,l molecular self-assembly, and wet etching and provides the…
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1989
1989
Badania proweniencyjne Zakładu Nasiennictwa i Selekcji IBL nad sosną pospolitą
J. Matraś
1989
Corpus ID: 89123520