Ion beam lithography

Known as: IBL, Ion beam projection lithography, Ion projection lithography 
Ion beam lithography is the practice of scanning a focused beam of ions in a patterned fashion across a surface in order to create very small… Expand
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2016
2016
Helium ion beam lithography (HIBL) is a novel alternative lithographic technique with the capacity of fabricating highresolution… Expand
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Review
2014
Review
2014
Patterning with a focused ion beam (FIB) is an extremely versatile fabrication process that can be used to create microscale and… Expand
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2011
2011
Optical lithography is the unrivalled mainstream patterning method that allows for costefficient, high-volume fabrication of… Expand
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2009
2009
A scanning-helium-ion-beam microscope is now commercially available. This microscope can be used to perform lithography similar… Expand
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2005
2005
ADDITIONAL INDEX WORDS. Xanthomonas euvesicatoria, X. vesicatoria, X. perforans, X. gardneri, Pseudomonas syringae pv. tomato… Expand
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2003
2003
Maskless, Resistless Ion Beam Lithography Processes by Qing Ji B.S. (University of Science and Technology of China) 1993 M.A… Expand
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1999
1999
Submicron patterning of 1 in. diameter curved surfaces with a 46 mm radius of curvature has been demonstrated with step and flash… Expand
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1999
1999
Abstract The combination of deep X-ray lithography with electroforming and micromoulding (i.e., LIGA) has been shown to offer… Expand
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1999
1999
ABSTRACT As one ofthe Next Generation Lithographies, Ion-beam Projection Lithography (IPL) will be subject to strict error… Expand
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1987
1987
Apparatus and method for projection ion beam lithography are described which allow formation of low distortion, large field… Expand
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