Hardmask

Known as: Hard mask 
A hardmask is a material used in semiconductor processing as an etch mask in lieu of polymer or other organic "soft" resist materials. The idea is… (More)
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Papers overview

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2017
2017
The fabrication of a novel class of microgrippers is demonstrated by means of bulk microelectromechanical systems (MEMS… (More)
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2015
2015
Localization of sound sources in adverse environments is an important challenge in robot audition. The target sound source is… (More)
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2010
2010
In this work we present for the first time correlation of lateral uniaxial tensile strain and I–V characteristics of GAA Si NW n… (More)
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2009
2009
This paper presents robust trilayer lithography technology for cutting-edge IC fabrication and double-patterning applications… (More)
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Highly Cited
2007
Highly Cited
2007
The problem of single-channel speaker separation attempts to extract a speech signal uttered by the speaker of interest from a… (More)
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2007
2007
This paper analyzes the geometry-dependent parasitic components in multifin double-gate fin field-effect transistors (FinFETs… (More)
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2005
2005
Micromachined accelerometers were packaged at waferlevel by bonding a through-hole etched cap wafer to a micromachined device… (More)
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2004
2004
High aspect ratio silicon trench etch is a key process to manufacture trench capacitor DRAMs. The capacitance is directly… (More)
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2004
2004
The problem of single channel speaker separation, attempts to extract a speech signal uttered by the speaker of interest from a… (More)
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2003
2003
This work investigated the impact of pMOST bias-temperature (BT) degradation on logic product speed (F/sub max/) and minimum… (More)
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