Etching

Known as: Acid polishing, Chemical polishing, Wafer etching 
Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important… (More)
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Topic mentions per year

Topic mentions per year

1960-2017
050019602017

Papers overview

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2006
2006
The basic results of plasma etching of silicon in CCI<sub>2</sub>F<sub>2</sub>/O<sub>2</sub> in quartz reactor with teflon… (More)
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Highly Cited
2005
Highly Cited
2005
The anisotropic etching behavior of single-crystal silicon and the behavior of SiO2 and Si3N4 in an ethylenediaminebased solution… (More)
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2005
2005
The purpose of this paper is to find ways to Improve the wet etching techniques used for glass etching. Essential elements of… (More)
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Highly Cited
2000
Highly Cited
2000
A simple and effective method is presented for producing light-emitting porous silicon ~PSi!. A thin (d,10 nm! layer of Au, Pt… (More)
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2000
2000
. Acid etching is widely used in clinical dentistry to facilitate the mechanical retention of resin-based materials to teeth, in… (More)
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1993
1993
The time development of emergent faces in crystal etching is investigated. We present and discuss a novel computational approach… (More)
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1990
1990
The characteristics of excimer lasers and the nature of ablation and etching processes are described. The two kinds of laser… (More)
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1980
1980
  • L. Ephrath
  • IEEE Transactions on Electron Devices
  • 1980
Reactive Ion Etching (RIE) is a dry etching technique that is used to etch 1-&#181;m and submicrometer patterns into films of… (More)
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Highly Cited
1978
Highly Cited
1978
Anisotropic etching of silicon has become an important technology in silicon semiconductor processing during the past ten years… (More)
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1970
1970
The freeze-etch technique was used to observe red blood cell ghosts labeled on both surfaces with covalently bound ferritin… (More)
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