FAQ

Borophosphosilicate glass

Known as: BPSG, Borophophosilicate glass 
Borophosphosilicate glass, commonly known as BPSG, is a type of silicate glass that includes additives of both boron and phosphorus. Silicate glasses… (More)
Wikipedia

Topic mentions per year

Topic mentions per year

1985-2015
02419852015

Related topics

Related topics

5 relations
Phosphosilicate glassRadiation hardeningSingle event upsetSoft error

Broader (1)

Semiconductor device fabrication

Related mentions per year

Related mentions per year

1937-2018
19401960198020002020
Borophosphosilicate glass
Semiconductor device fabrication
Soft error
Radiation hardening
Single event upset
Phosphosilicate glass

Papers overview

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2010
2010
B10 finding and correlation to thermal neutron soft error rate sensitivity for SRAMs in the sub-micron technology
In this paper, we report the presence of B10 based on SIMS analysis in SRAM arrays in the 90nm to 45nm technology nodes. The… (More)
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Highly Cited
2005
Highly Cited
2005
Soft errors in advanced computer systems
As the dimensions and operating voltages of computer electronics shrink to satisfy consumers' insatiable demand for higher… (More)
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2005
2005
Cancer-radiotherapy equipment as a cause of soft errors in electronic equipment
The undesirable production of secondary neutrons by cancer-radiotherapy linear accelerators (linac) has been demonstrated to… (More)
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2002
2002
Soft errors in SRAM devices induced by high energy neutrons, thermal neutrons and alpha particles
We measured the soft error rates (SER) of SRAM devices in several field tests, and obtained SERs induced independently by high… (More)
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1997
1997
A Fully Printable, Self-aligned And Planarized Stacked Capacitor DRAM Cell Technology For 1Gbit DRAM And Beyond
Introduction In order to achieve <400mm2 chip size for lGDRAM production, 0.3um pitch fine patterning must be needed… (More)
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1997
1997
A selective-epitaxial SiGe HBT with SMI electrodes featuring 9.3-ps ECL-gate delay
A selective-epitaxial SiGe base heterojunction bipolar transistor (HBT) with self-aligned stacked metal/IDP (SMI) electrodes is… (More)
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1996
1996
Sub-10-fJ ECL/68-/spl mu/A 4.7-GHz divider ultra-low-power SiGe base bipolar transistors with a wedge-shaped CVD-SiO/sub 2/ isolation structure and a BPSG-refilled trench
Ultra-low-power SiGe base bipolar transistors with a wedge-shaped CVD-SiO/sub 2/ isolation structure and a boro-phosphosilicate… (More)
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1989
1989
Reduction of Titanium Silicide Degradation During Borophosphosilicate Glass Reflow
The application of a self-aligned silicide (``salicide'') process with Ti requires reduction of following excessive heat… (More)
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1987
1987
Moisture Resistance of Borophosphosilicate Glass Films
The moisture resistance of chemically vapor deposited borophosphosilicate glass (BPSG) films has been studied. The films were… (More)
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1985
1985
A novel borophosphosilicate glass process
  • C. Y. Fu
  • 1985 International Electron Devices Meeting
  • 1985
A novel low cost borophosphosilicate glass (BPSG) technology suitable for one micron processing is presented here. This technique… (More)
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