Borophosphosilicate glass

Known as: BPSG, Borophophosilicate glass 
Borophosphosilicate glass, commonly known as BPSG, is a type of silicate glass that includes additives of both boron and phosphorus. Silicate glasses… (More)
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Topic mentions per year

1985-2015
02419852015

Papers overview

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2010
2010
In this paper, we report the presence of B10 based on SIMS analysis in SRAM arrays in the 90nm to 45nm technology nodes. The… (More)
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Highly Cited
2005
Highly Cited
2005
As the dimensions and operating voltages of computer electronics shrink to satisfy consumers' insatiable demand for higher… (More)
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2005
2005
The undesirable production of secondary neutrons by cancer-radiotherapy linear accelerators (linac) has been demonstrated to… (More)
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2002
2002
We measured the soft error rates (SER) of SRAM devices in several field tests, and obtained SERs induced independently by high… (More)
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1997
1997
Introduction In order to achieve <400mm2 chip size for lGDRAM production, 0.3um pitch fine patterning must be needed… (More)
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1997
1997
A selective-epitaxial SiGe base heterojunction bipolar transistor (HBT) with self-aligned stacked metal/IDP (SMI) electrodes is… (More)
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1996
1996
Ultra-low-power SiGe base bipolar transistors with a wedge-shaped CVD-SiO/sub 2/ isolation structure and a boro-phosphosilicate… (More)
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1989
1989
The application of a self-aligned silicide (``salicide'') process with Ti requires reduction of following excessive heat… (More)
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1987
1987
The moisture resistance of chemically vapor deposited borophosphosilicate glass (BPSG) films has been studied. The films were… (More)
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1985
1985
  • C. Y. Fu
  • 1985 International Electron Devices Meeting
  • 1985
A novel low cost borophosphosilicate glass (BPSG) technology suitable for one micron processing is presented here. This technique… (More)
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