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Borophosphosilicate glass

Known as: BPSG, Borophophosilicate glass 
Borophosphosilicate glass, commonly known as BPSG, is a type of silicate glass that includes additives of both boron and phosphorus. Silicate glasses… Expand
Wikipedia

Related topics

Related topics

5 relations
Phosphosilicate glassRadiation hardeningSingle event upsetSoft error

Broader (1)

Semiconductor device fabrication

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2013
2013
Neutron Induced Single Event Upset Dependence on Bias Voltage for CMOS SRAM With BPSG
We have measured the Single Event Upset (SEU) probability of a static random access memory (SRAM) under neutron irradiation as a… Expand
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2010
2010
B10 finding and correlation to thermal neutron soft error rate sensitivity for SRAMs in the sub-micron technology
In this paper, we report the presence of B10 based on SIMS analysis in SRAM arrays in the 90nm to 45nm technology nodes. The… Expand
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2006
2006
Investigation of Thermal Neutron Induced Soft Error Rates in Commercial Srams with 0.35 μm to 90 nm Technologies
Measurement of soft error rates (SER) often commercial SRAMs of 0.35 μm to 90 nm technologies have been completed at the Institut… Expand
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2005
2005
Cancer-radiotherapy equipment as a cause of soft errors in electronic equipment
The undesirable production of secondary neutrons by cancer-radiotherapy linear accelerators (linac) has been demonstrated to… Expand
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Highly Cited
2005
Highly Cited
2005
Cache and memory error detection, correction, and reduction techniques for terrestrial servers and workstations
  • C.W. Slayman
  • IEEE Transactions on Device and Materials…
  • 2005
    • Corpus ID: 29728860
As the size of the SRAM cache and DRAM memory grows in servers and workstations, cosmic-ray errors are becoming a major concern… Expand
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2003
2003
Strain partition of Si/SiGe and SiO2/SiGe on compliant substrates
Strain partitioning of crystalline Si and amorphous SiO2 deposited on crystalline SiGe on a compliant viscous… Expand
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2002
2002
Soft errors in SRAM devices induced by high energy neutrons, thermal neutrons and alpha particles
We measured the soft error rates (SER) of SRAM devices in several field tests, and obtained SERs induced independently by high… Expand
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2002
2002
Strain relaxation of SiGe islands on compliant oxide
The relaxation of patterned, compressively strained, epitaxial Si0.7Ge0.3 films transferred to borophosphorosilicate (BPSG) glass… Expand
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2001
2001
Relaxation of a Strained Elastic Film on a Viscous Layer
Experiments were conducted with SiGe film islands on a layer of borophosphorosilicate glass (BPSG). Initially the SiGe is under… Expand
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1985
1985
Optimized chemical vapor deposition of borophosphosilicate glass films
Le depot sous pression atmospherique est effectue dans des conditions optimales pour economiser les reactifs et reduire la… Expand
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