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Borophosphosilicate glass

Known as: BPSG, Borophophosilicate glass 
Borophosphosilicate glass, commonly known as BPSG, is a type of silicate glass that includes additives of both boron and phosphorus. Silicate glasses… Expand
Wikipedia

Related topics

Related topics

5 relations
Phosphosilicate glassRadiation hardeningSingle event upsetSoft error

Broader (1)

Semiconductor device fabrication

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2013
2013
Neutron Induced Single Event Upset Dependence on Bias Voltage for CMOS SRAM With BPSG
We have measured the Single Event Upset (SEU) probability of a static random access memory (SRAM) under neutron irradiation as a… Expand
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Highly Cited
2005
Highly Cited
2005
Cache and memory error detection, correction, and reduction techniques for terrestrial servers and workstations
  • C. Slayman
  • IEEE Transactions on Device and Materials…
  • 2005
    • Corpus ID: 29728860
As the size of the SRAM cache and DRAM memory grows in servers and workstations, cosmic-ray errors are becoming a major concern… Expand
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2005
2005
Cancer-radiotherapy equipment as a cause of soft errors in electronic equipment
The undesirable production of secondary neutrons by cancer-radiotherapy linear accelerators (linac) has been demonstrated to… Expand
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2005
2005
Ultrathin strained-SOI by stress balance on compliant substrates and FET performance
Ultrathin, strained-silicon-on-insulator (s-SOI) structures without a residual silicon-germanium (SiGe) underlayer have been… Expand
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2003
2003
Strain partition of Si/SiGe and SiO2/SiGe on compliant substrates
Strain partitioning of crystalline Si and amorphous SiO2 deposited on crystalline SiGe on a compliant viscous… Expand
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Highly Cited
2002
Highly Cited
2002
Strain relaxation of SiGe islands on compliant oxide
The relaxation of patterned, compressively strained, epitaxial Si0.7Ge0.3 films transferred to borophosphorosilicate (BPSG) glass… Expand
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2002
2002
Soft errors in SRAM devices induced by high energy neutrons, thermal neutrons and alpha particles
We measured the soft error rates (SER) of SRAM devices in several field tests, and obtained SERs induced independently by high… Expand
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2001
2001
Relaxation of a strained elastic film on a viscous layer
Experiments were conducted with SiGe film islands on a layer of borophosphorosilicate glass (BPSG). Initially the SiGe is under… Expand
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1985
1985
Optimized chemical vapor deposition of borophosphosilicate glass films
Le depot sous pression atmospherique est effectue dans des conditions optimales pour economiser les reactifs et reduire la… Expand
1983
1983
Inter-metal dielectric and passivation-related properties of plasma BPSG
On revoit les proprietes de verres a base de silicate, phosphore et bore obtenus par depot chimique en phase vapeur dans un… Expand
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