• Corpus ID: 7947779

review of nanometer resolution position sensors : Operation and performance ndrew

@inproceedings{Fleming2012reviewON,
  title={review of nanometer resolution position sensors : Operation and performance ndrew},
  author={Jimmy L. Fleming},
  year={2012}
}
Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution and speed of the machine, the sensor performance is a foremost consideration. The first goal of this article is to define concise performance metrics and to provide exact and approximate expressions for error sources including non-linearity, drift and noise. The second goal is to review current position sensor… 

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