pH MEASUREMENT USING MICRO GAP STRUCTURE

@inproceedings{Hashim2011pHMU,
  title={pH MEASUREMENT USING MICRO GAP STRUCTURE},
  author={Uda Hashim and T. Nazwa and Muhammad Hussain Kashif and Taman Pertiwi Indah and Jalan Kangar-Alor Setar},
  year={2011}
}
This work demonstrates the fabrication and electrical characterization of microgaps and successfully employed as an electrochemical sensor for the determination of pH and biomolecule. In present work, we have used two (2) mask designs. The first mask is for defining the lateral micro gap and the second mask is for Aluminum (Al) electrode patterning. Lateral microgaps are formed using polysilicon and Al as contact pad electrode. Conventional photolithography is used to fabricate the microgap… CONTINUE READING

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