involved a simple suspension system that reacts depending on the applied DC voltage bias or constant electrostatic field

We present the design and analysis of a MEMS variable capacitor coupled to thermal actuators. The variable capacitor is composed by two main components: 1) the capacitor built by two squared plates, which one plate is mechanically fixed to the substrate and the other is a moving plate having mechanical suspensions (springs) connected from each corner of it… CONTINUE READING