echanical behaviour characterisation of silicon and effect of loading rate on op-in : A nanoindentation study under ultra-low loads


This paper aims to clarify the confusion in interpreting the deformation mechanism of monocrystalline silicon subjected to nanoindentation. The indentation tests were carried out over an ultra-low range of loads with various loading rates using a Berkovich indenter. It was found that with a proper area function of the indenter tip the mechanical properties… (More)

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