ZrB2 thin films grown by high power impulse magnetron sputtering (HiPIMS) from a compound target

Abstract

ZrB2 thin films were grown on Si by high power impulse magnetron sputtering (HiPIMS) from a compound target in an industrial deposition system. By keeping a constant average power while modifying the HiPIMS pulse repetition frequency, the pulse peak current and thereby the degree of ionisation was varied. The films were characterised using X-ray diffraction… (More)

Topics

5 Figures and Tables

Slides referencing similar topics