ZnO/sapphire based layered surface acoustic wave devices for microfluidic applications

Abstract

The microfluidic applications of a ZnO/Sapphire based layered surface acoustic wave structure are being investigated. Properties of the ZnO/Sapphire layered SAW device including surface wave velocity and propagation loss were measured and correlated to the fluidic behavior of micro droplets. Acoustic streaming was observed in the form of two vortices. Micro particles were also observed to concentrate in the vortices within 4 seconds of device activations.

DOI: 10.1109/NEMS.2011.6017330

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Cite this paper

@inproceedings{Tjeung2011ZnOsapphireBL, title={ZnO/sapphire based layered surface acoustic wave devices for microfluidic applications}, author={Ricky T. Tjeung and Devendra K. Maurya and Leslie Y. Yeo and James R. Friend and Sasikaran Kandasamy}, booktitle={NEMS}, year={2011} }