Zinc-oxide thin-film surface-wave transducers

  title={Zinc-oxide thin-film surface-wave transducers},
  author={F. S. Hickernell},
  journal={Proceedings of the IEEE},
The piezoelectric film layer transducer represents the most efficient method for generating and detecting surface acoustic waves on nonpiezoelectric substrates. ZnO, which has a strong piezoelectric effect and can readily be sputtered as an oriented crystalline composite on a wide variety of substrates, is a natural choice as the piezoelectric film layer. This paper summarizes a body of knowledge which has been developed on the characteristics of transducer quality ZnO film layers, and focuses… CONTINUE READING
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