• Corpus ID: 239885820

Zinc Oxide-Based Piezoelectric Pressure Sensor

  title={Zinc Oxide-Based Piezoelectric Pressure Sensor},
  author={Victor K. Samoei and Ahalapitiya H. Jayatissa},
This paper reports the application of zinc oxide (ZnO) in the pressure sensors that can be integrated with a microelectromechanical system (MEMS). ZnO is one of the materials that has received a great deal of attention due to its unique properties of being a semiconductor with wide bandgap and piezoelectric effects. The simpler crystal growth mechanisms of ZnO have resulted in a lower cost of ZnObased sensors. Different types of pressure sensors based on ZnO sensing elements have also been… 


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