Yield modeling and BEOL fundamentals

@inproceedings{Gyvez2001YieldMA,
  title={Yield modeling and BEOL fundamentals},
  author={Jos{\'e} Pineda de Gyvez},
  booktitle={SLIP},
  year={2001}
}
The advent of deep submicron technologies with larger die sizes lends itself to an increase in fabrication cost. An appropriate yield forecast renders significant benefits in both time-to-market and manufacturing cost prediction. Yield forecasting is essential for the development of new products as it effectively shows if a design is feasible of meeting its cost objectives or not. In mature manufacturing processes, spot defects are the main detractors in the successful outcome of an IC. Their… CONTINUE READING

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