Yield- and Cost-Driven Fracturing for Variable Shaped-Beam Mask Writing

Abstract

Mask manufacturing for the approaching 90nm and 65nm nodes increasingly deploys variable shaped beam (VSB) mask writing machines. This has led to high interest in the fracturing methods which are at the heart of layout data preparation for VSB mask writing. In this paper, we set out the main requirements for fracturing and suggest a new solution approach… (More)

Topics

12 Figures and Tables

Cite this paper

@inproceedings{Kahng2004YieldAC, title={Yield- and Cost-Driven Fracturing for Variable Shaped-Beam Mask Writing}, author={Andrew B. Kahng and Xu Xub and Alex Zelikovskyc}, year={2004} }