XRD and AFM Studies on Nanostructured Zinc Aluminum Oxide Thin Films Prepared by Multi-Target Magnetron Sputtering

@inproceedings{Kumar2017XRDAA,
  title={XRD and AFM Studies on Nanostructured Zinc Aluminum Oxide Thin Films Prepared by Multi-Target Magnetron Sputtering},
  author={Boorle Rajesh Kumar and B. Hymavathi and Toleti Subba Rao},
  year={2017}
}
Abstract Zinc Aluminum Oxide (ZAO) thin films have been deposited on glass substrates by DC reactive magnetron co-sputtering at different sputtering powers of Zn varied from 85 to 125 W. X-ray diffraction patterns exhibits ZAO thin films had a diffraction peak corresponding to (0 0 2) preferred orientation with c-axis perpendicular to the substrate surface. X-ray diffraction patterns have been used to determine the structural parameters such as crystallite size, stress, strain and lattice… CONTINUE READING