XPS structural characterization of hydrogenated amorphous carbon thin films prepared by shielded arc ion plating

@inproceedings{Taki1998XPSSC,
  title={XPS structural characterization of hydrogenated amorphous carbon thin films prepared by shielded arc ion plating},
  author={Yusuke Taki and Osamu Nagoya Takai},
  year={1998}
}
Abstract Hydrogenated amorphous carbon (a-C:H) thin films were synthesized by shielded arc ion plating. Structural characterization of the a-C:H films was performed using Raman, infrared and X-ray photoelectron spectroscopy (XPS). It is concluded that XPS is useful for estimating sp 2 and sp 3 carbon networks in the a-C:H films by analyzing the peak positions and FWHM (full width at half maximum) values of XPS C 1 s spectra. 

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