X-ray scattering of periodic and graded multilayers: comparison of experiments to simulations from surface microroughness characterization
@article{Salmaso2013XraySO, title={X-ray scattering of periodic and graded multilayers: comparison of experiments to simulations from surface microroughness characterization}, author={Bianca Salmaso and Daniele Spiga and Rodolfo Canestrari and Lorenzo Raimondi}, journal={Nuclear Instruments \& Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment}, year={2013}, volume={710}, pages={106-113} }
Figures from this paper
2 Citations
Simulation and modeling of silicon pore optics for the ATHENA x-ray telescope
- PhysicsAstronomical Telescopes + Instrumentation
- 2016
The ATHENA X-ray observatory is a large-class ESA approved mission, with launch scheduled in 2028. The technology of silicon pore optics (SPO) was selected as baseline to assemble ATHENA's optic with…
Light scattering and roughness properties of optical components for 13.5 nm
- Physics
- 2015
Die stetige Reduzierung der Belichtungswellenlangen in der optischen Lithographie, motiviert durch die Herstellung immer kleinerer Halbleiterbauelemente, zieht enorme Herausforderungen an optische…
References
SHOWING 1-10 OF 23 REFERENCES
Accurate modeling of periodic and graded multilayer x-ray scattering from surface microroughness characterization
- PhysicsOptical Engineering + Applications
- 2011
Several hard X-ray imaging telescopes of the next future will be characterized by a high angular resolution. To this end, it is necessary to produce optics with a very low surface microroughness, as…
Analysis of microroughness evolution in x-ray astronomical multilayer mirrors by surface topography with the MPES program and by x-ray scattering
- PhysicsSPIE Astronomical Telescopes + Instrumentation
- 2006
Future hard X-ray telescopes (e.g. SIMBOL-X and Constellation-X) will make use of hard X-ray optics with multilayer coatings, with angular resolutions comparable to the achieved ones in the soft…
Multilayer coatings for x-ray mirrors: extraction of stack parameters from x-ray reflectivity scans and comparison with transmission electron microscopy results
- Physics, Materials Science
- 2007
The reflectance effectiveness of a multilayer depends strongly on the stack properties thickness, roughness, and density of each layer and can be directly tested by means of x-ray reflectivity scans…
Nonspecular x-ray scattering in a multilayer-coated imaging system
- Physics
- 1998
We present a rigorous theoretical treatment of nonspecular x-ray scattering in a distributed imaging system consisting of multilayer-coated reflective optics. The scattering from each optical surface…
The Interpretation Of Glancing Incidence Scattering Measurements
- PhysicsOther Conferences
- 1986
The practical testing and specification of x-ray and UV mirrors requires a scattering theory to link topographic finish errors and functional performance. This paper examines various smooth-surface…
Design of grazing-incidence multilayer supermirrors for hard-x-ray reflectors.
- PhysicsApplied optics
- 1995
Adaptations of neutron designs that take the effects of imperfect layer interfaces and absorption in the overlying layers into account are presented, and a thorough analysis of two specific applications shows that an improved performance can be obtained.
Analysis of X-ray scattering from a rough multilayer mirror in the first-order perturbation theory
- Physics
- 2003
High-Resolution X-Ray Scattering from Thin Films and Multilayers
- Physics, Materials Science
- 1998
Part 1 Experimental realization: basic elements of an equipment resolution elements diffractometers and reflectometers. Part 2 The theory of X-ray diffraction and its realization by the experiment:…
EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates.
- PhysicsOptics express
- 2007
Highly reflective Molybdenum/Silicon multilayer mirrors for 13.5nm characterized at-wavelength using a new laboratory size measurement system for EUV reflectance and scattering indicates roughness enhancement as well as smoothing effects during thin film growth.
Modern developments in X-ray and neutron optics
- Physics
- 2008
Theoretical Approaches and Calculations.- X-Ray and Neutron Optical Systems.- The BESSY Raytrace Program RAY.- Neutron Beam Phase Space Mapping.- Raytrace of Neutron Optical Systems with RESTRAX.-…