X-ray scattering of periodic and graded multilayers: comparison of experiments to simulations from surface microroughness characterization

@article{Salmaso2013XraySO,
  title={X-ray scattering of periodic and graded multilayers: comparison of experiments to simulations from surface microroughness characterization},
  author={Bianca Salmaso and Daniele Spiga and Rodolfo Canestrari and Lorenzo Raimondi},
  journal={Nuclear Instruments \& Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment},
  year={2013},
  volume={710},
  pages={106-113}
}
  • B. SalmasoD. Spiga L. Raimondi
  • Published 14 January 2013
  • Physics, Materials Science
  • Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment

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References

SHOWING 1-10 OF 23 REFERENCES

Accurate modeling of periodic and graded multilayer x-ray scattering from surface microroughness characterization

Several hard X-ray imaging telescopes of the next future will be characterized by a high angular resolution. To this end, it is necessary to produce optics with a very low surface microroughness, as

Multilayer coatings for x-ray mirrors: extraction of stack parameters from x-ray reflectivity scans and comparison with transmission electron microscopy results

The reflectance effectiveness of a multilayer depends strongly on the stack properties thickness, roughness, and density of each layer and can be directly tested by means of x-ray reflectivity scans

Nonspecular x-ray scattering in a multilayer-coated imaging system

We present a rigorous theoretical treatment of nonspecular x-ray scattering in a distributed imaging system consisting of multilayer-coated reflective optics. The scattering from each optical surface

The Interpretation Of Glancing Incidence Scattering Measurements

The practical testing and specification of x-ray and UV mirrors requires a scattering theory to link topographic finish errors and functional performance. This paper examines various smooth-surface

Design of grazing-incidence multilayer supermirrors for hard-x-ray reflectors.

Adaptations of neutron designs that take the effects of imperfect layer interfaces and absorption in the overlying layers into account are presented, and a thorough analysis of two specific applications shows that an improved performance can be obtained.

Development of a multilayer supermirror for hard x-ray telescopes

We present a current status of the development of hard x-ray telescope using Pt/C multilayer supermirror. The telescope system is to be made by combining thin foil replication technology for high

High-Resolution X-Ray Scattering from Thin Films and Multilayers

Part 1 Experimental realization: basic elements of an equipment resolution elements diffractometers and reflectometers. Part 2 The theory of X-ray diffraction and its realization by the experiment:

EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates.

Highly reflective Molybdenum/Silicon multilayer mirrors for 13.5nm characterized at-wavelength using a new laboratory size measurement system for EUV reflectance and scattering indicates roughness enhancement as well as smoothing effects during thin film growth.

Modern developments in X-ray and neutron optics

Theoretical Approaches and Calculations.- X-Ray and Neutron Optical Systems.- The BESSY Raytrace Program RAY.- Neutron Beam Phase Space Mapping.- Raytrace of Neutron Optical Systems with RESTRAX.-