Widely Tunable MEMS-Based Fabry–Perot Filter

  title={Widely Tunable MEMS-Based Fabry–Perot Filter},
  author={J. S. Milne and J. M. Dell and A. J. Keating and L. Faraone},
  journal={Journal of Microelectromechanical Systems},
This paper describes the use of strain stiffening in fixed-fixed beam actuators to extend the tuning range of microelectromechanical-systems-based Fabry-Perot filters. The measured wavelength tuning range of 1.615-2.425 mum is the largest reported for such a filter. Curvature in the movable mirror was corrected using a low-power oxygen plasma to controllably alter the stress gradient in the mirror. After curvature correction, the linewidth of a filter was 52 nm, close to the theoretical minimum… CONTINUE READING
Highly Cited
This paper has 37 citations. REVIEW CITATIONS


Publications citing this paper.
Showing 1-10 of 26 extracted citations


Publications referenced by this paper.
Showing 1-10 of 31 references

The Fabry–Perot Interferometer

  • J. M. Vaughan
  • Bristol, PA: Adam Hilger,
  • 1989
Highly Influential
4 Excerpts

Mirror electrostatic actuation of a medium-infrared tuneable Fabry–Perot interferometer based on a surface micromachining process

  • N. Sabaté, R. Rubio, +6 authors S. Marco
  • Sens. Actuators A, Phys., vol. 123/124, pp. 584…
  • 2005
Highly Influential
4 Excerpts

An analytical model for pull-in voltage of clamped-clamped multilayer beams

  • H. Rong, Q.-A. Huang, M. Nie, W. Li
  • Sens. Actuators A, Phys., vol. 116, no. 1, pp. 15…
  • 2004
Highly Influential
4 Excerpts

Extending the tuning range of SWIR microspectrometers

  • J. S. Milne, A. J. Keating, J. Antoszewski, J. M. Dell, C. A. Musca, L. Faraone
  • Proc. Infrared Technol. Appl. XXXIII, Orlando, FL…
  • 2007
6 Excerpts

Similar Papers

Loading similar papers…