Widely Tunable MEMS-Based Fabry–Perot Filter

@article{Milne2009WidelyTM,
  title={Widely Tunable MEMS-Based Fabry–Perot Filter},
  author={J. S. Milne and J. M. Dell and A. J. Keating and L. Faraone},
  journal={Journal of Microelectromechanical Systems},
  year={2009},
  volume={18},
  pages={905-913}
}
This paper describes the use of strain stiffening in fixed-fixed beam actuators to extend the tuning range of microelectromechanical-systems-based Fabry-Perot filters. The measured wavelength tuning range of 1.615-2.425 mum is the largest reported for such a filter. Curvature in the movable mirror was corrected using a low-power oxygen plasma to controllably alter the stress gradient in the mirror. After curvature correction, the linewidth of a filter was 52 nm, close to the theoretical minimum… CONTINUE READING
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