Wet Release of Multipolymeric Structures with a Nanoscale Release Layer

@article{Pesantez2007WetRO,
  title={Wet Release of Multipolymeric Structures with a Nanoscale Release Layer},
  author={D. Pesantez and A. Gadre},
  journal={TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference},
  year={2007},
  pages={485-488}
}
A promising wet release process using OmniCoatTM has been developed for the release of the multilayer microsensor device that is being used for biomedical applications. OmniCoatTM has high thermal stability (Tg ~190degC) which makes it compatible with high temperature processes. A multilayer fabrication approach and OmniCoat release layer was successfully integrated for a microsensor device to be released from the substrate. Highly aligned structures and good adhesion between metals and cured… CONTINUE READING