Water-soluble sacrificial layers for surface micromachining.

  title={Water-soluble sacrificial layers for surface micromachining.},
  author={Vincent Linder and Byron D. Gates and Declan Ryan and Babak A. Parviz and George M Whitesides},
  volume={1 7},
This manuscript describes the use of water-soluble polymers for use as sacrificial layers in surface micromachining. Water-soluble polymers have two attractive characteristics for this application: 1) They can be deposited conveniently by spin-coating, and the solvent removed at a low temperature (95-150 degrees C), and 2) the resulting layer can be dissolved in water; no corrosive reagents or organic solvents are required. This technique is therefore compatible with a number of fragile… CONTINUE READING
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