Water-soluble sacrificial layers for surface micromachining.

@article{Linder2005WatersolubleSL,
  title={Water-soluble sacrificial layers for surface micromachining.},
  author={Vincent Linder and Byron D. Gates and Declan Ryan and Babak A. Parviz and George M Whitesides},
  journal={Small},
  year={2005},
  volume={1 7},
  pages={730-6}
}
This manuscript describes the use of water-soluble polymers for use as sacrificial layers in surface micromachining. Water-soluble polymers have two attractive characteristics for this application: 1) They can be deposited conveniently by spin-coating, and the solvent removed at a low temperature (95-150 degrees C), and 2) the resulting layer can be dissolved in water; no corrosive reagents or organic solvents are required. This technique is therefore compatible with a number of fragile… CONTINUE READING
Highly Cited
This paper has 81 citations. REVIEW CITATIONS

Citations

Publications citing this paper.
Showing 1-10 of 49 extracted citations

81 Citations

051015'08'11'14'17
Citations per Year
Semantic Scholar estimates that this publication has 81 citations based on the available data.

See our FAQ for additional information.

References

Publications referenced by this paper.
Showing 1-4 of 4 references

IEEE International Conference on Micro Electro Mechanical Systems

  • K.-S. Yun, E. Yoon
  • Technical Digest, 17th, Maastricht, The…
  • 2004

Madou in The MEMS Handbook (Ed.: M. Gad-el-Hak)

  • M J.
  • CRC, Boca Raton, FL,
  • 2001
1 Excerpt

Thin Solid Films

  • D. J. Monk, D. S. Soane, R. T. Howe
  • Received: December 20,
  • 1993
1 Excerpt

Similar Papers

Loading similar papers…