Wafer-scale synthesis of single-crystal zigzag silicon nanowire arrays with controlled turning angles.

@article{Chen2010WaferscaleSO,
  title={Wafer-scale synthesis of single-crystal zigzag silicon nanowire arrays with controlled turning angles.},
  author={Huan Chen and Hui Wang and Xiaohong Zhang and Chun Sing Lee and Shuit-Tong Lee},
  journal={Nano letters},
  year={2010},
  volume={10 3},
  pages={864-8}
}
Silicon nanowires (SiNWs) having curved structures may have unique advantages in device fabrication. However, no methods are available to prepare curved SiNWs controllably. In this work, we report the preparation of three types of single-crystal SiNWs with various turning angles via metal-assisted chemical etching using (111)-oriented silicon wafers near room temperature. The zigzag SiNWs are single crystals and can be p- or n-doped using corresponding Si wafer as substrate. The controlled… CONTINUE READING
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